发明授权
- 专利标题: Proximity brush unit apparatus and method
- 专利标题(中): 接近刷单元装置和方法
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申请号: US10742303申请日: 2003-12-18
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公开(公告)号: US07353560B2公开(公告)日: 2008-04-08
- 发明人: John M. Boyd , Michael L. Orbock , Fred C. Redeker
- 申请人: John M. Boyd , Michael L. Orbock , Fred C. Redeker
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla & Gencarella, LLP
- 主分类号: A47L7/00
- IPC分类号: A47L7/00 ; G03D5/06 ; H01L21/00
摘要:
An apparatus is provided for producing a wet region and corresponding dry region on a wafer. A proximity brush unit delivers fluids with a rotatable brush to produce the wet region on the wafer. As the proximity brush unit moves in a selected scan method across the wafer, a plurality of ports produces the dry region on the wafer. Further, the rotatable brush disposed within the proximity brush unit can rotate via mechanical gears or electromagnetic levitation. The selected scan method that produces the wet region and the dry region moves the proximity brush unit in a variety of methods including a radial scan, a linear scan, a spiral scan and a raster scan. To further produce a dry region during the selected scan method, the plurality of ports disposed on the surface of the proximity brush unit is on the trailing edges of the proximity head unit and the wafer.
公开/授权文献
- US20050132515A1 Proximity brush unit apparatus and method 公开/授权日:2005-06-23
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