发明授权
US07355236B2 Non-volatile floating gate memory cells with polysilicon storage dots and fabrication methods thereof 有权
具有多晶硅存储点的非易失性浮动栅极存储单元及其制造方法

Non-volatile floating gate memory cells with polysilicon storage dots and fabrication methods thereof
摘要:
Non-volatile floating gate memory cells with polysilicon storage dots and fabrication methods thereof. The non-volatile floating gate memory cell comprises a semiconductor substrate of a first conductivity type. A first region of a second conductivity type different from the first conductivity type is formed in the semiconductor substrate. A second region of the second conductivity type is formed in the semiconductor substrate spaced apart from the first region. A channel region connects the first and second regions for the conduction of charges. A dielectric layer is disposed on the channel region. A control gate is disposed on the dielectric layer. A tunnel dielectric layer is conformably formed on the semiconductor substrate and the control gate. Two charge storage dots are spaced apart from each other at opposing lateral edges of the sidewalls of the control gate and surface of the semiconductor substrate.
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