发明授权
- 专利标题: Pattern exposure method and pattern exposure apparatus
- 专利标题(中): 图案曝光方法和图案曝光装置
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申请号: US11075245申请日: 2005-03-09
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公开(公告)号: US07372478B2公开(公告)日: 2008-05-13
- 发明人: Yoshitada Oshida , Yoshitatsu Naito , Mituhiro Suzuki , Bunji Uchiyama , Tsuyoshi Yamaguchi
- 申请人: Yoshitada Oshida , Yoshitatsu Naito , Mituhiro Suzuki , Bunji Uchiyama , Tsuyoshi Yamaguchi
- 申请人地址: JP Ebina-shi
- 专利权人: Hitachi Via Mechanics, Ltd.
- 当前专利权人: Hitachi Via Mechanics, Ltd.
- 当前专利权人地址: JP Ebina-shi
- 代理机构: Crowell & Moring LLP
- 优先权: JP2004-107662 20040331; JP2004-189017 20040625
- 主分类号: B41J2/47
- IPC分类号: B41J2/47 ; G03B27/54
摘要:
A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.
公开/授权文献
- US20050219496A1 Pattern exposure method and pattern exposure apparatus 公开/授权日:2005-10-06
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