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公开(公告)号：US20050219496A1
公开(公告)日：2005-10-06
申请号：US11075245
申请日：2005-03-09
CPC分类号： G03F7/70791 , G02B26/123 , G03F7/70383 , G03F7/70391 , G03F7/70466
摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.
摘要翻译： 图案曝光方法和图案曝光装置，其中通过廉价的装置提高生产量并且没有低的运行成本。 从多个半导体激光器分别发射的多个激光束的输出面分别布置在两个方向上。 方向之一是与多面镜的扫描方向相同的方向，而另一方向是与多面镜的扫描方向交叉的方向。 在这种情况下，使排列在与多面镜的扫描方向交叉的方向上的输出面的阵列间距等于曝光图案的分辨率。 在这种情况下，每个激光器的波长可以不超过410nm。
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公开(公告)号：US20080213705A1
公开(公告)日：2008-09-04
申请号：US12098089
申请日：2008-04-04
CPC分类号： G03F7/70791 , G02B26/123 , G03F7/70383 , G03F7/70391 , G03F7/70466
摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.
摘要翻译： 图案曝光方法和图案曝光装置，其中通过廉价的装置提高生产量并且没有低的运行成本。 从多个半导体激光器分别发射的多个激光束的输出面分别布置在两个方向上。 方向之一是与多面镜的扫描方向相同的方向，而另一方向是与多面镜的扫描方向交叉的方向。 在这种情况下，使排列在与多面镜的扫描方向交叉的方向上的输出面的阵列间距等于曝光图案的分辨率。 在这种情况下，每个激光器的波长可以不超过410nm。
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公开(公告)号：US4729108A
公开(公告)日：1988-03-01
申请号：US774471
申请日：1985-09-10
申请人： Bunji Uchiyama
发明人： Bunji Uchiyama
CPC分类号： G06F3/046
摘要： A coordinate detection system is disclosed which comprises a pointer which is excited by current of a predetermined frequency. Two conductors are arranged on a tablet for producing voltages which depend on the position of the tablet at which the pointer is located. Selector wires are arranged at intervals of half cycles of the conductors and a processor computes the position pointed to on the tablet based on an output voltage obtained, while scanning selected selector-wire pairs, sequentially, from any selected selector-wire pair exceeding a predetermined set voltage. The processor provides an output indicating the phase difference between waveforms induced in said two conductors.
摘要翻译： 公开了一种坐标检测系统，其包括由预定频率的电流激发的指针。 两个导体布置在平板电脑上，用于产生取决于指针所在的平板电脑的位置的电压。 选择器导线以导体的半个周期的间隔布置，并且处理器基于所获得的输出电压来计算在平板电脑上指向的位置，同时从选定的选定器线对中顺序扫描所选择的选择器线对，超过预定的 设定电压。 处理器提供指示在所述两个导体中感应的波形之间的相位差的输出。
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公开(公告)号：US07372478B2
公开(公告)日：2008-05-13
申请号：US11075245
申请日：2005-03-09
CPC分类号： G03F7/70791 , G02B26/123 , G03F7/70383 , G03F7/70391 , G03F7/70466
摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.
摘要翻译： 图案曝光方法和图案曝光装置，其中通过廉价的装置提高生产量并且没有低的运行成本。 从多个半导体激光器分别发射的多个激光束的输出面分别布置在两个方向上。 方向之一是与多面镜的扫描方向相同的方向，而另一方向是与多面镜的扫描方向交叉的方向。 在这种情况下，使排列在与多面镜的扫描方向交叉的方向上的输出面的阵列间距等于曝光图案的分辨率。 在这种情况下，每个激光器的波长可以不超过410nm。
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