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公开(公告)号：US20080213705A1
公开(公告)日：2008-09-04
申请号：US12098089
申请日：2008-04-04
CPC分类号： G03F7/70791 , G02B26/123 , G03F7/70383 , G03F7/70391 , G03F7/70466
摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.
摘要翻译： 图案曝光方法和图案曝光装置，其中通过廉价的装置提高生产量并且没有低的运行成本。 从多个半导体激光器分别发射的多个激光束的输出面分别布置在两个方向上。 方向之一是与多面镜的扫描方向相同的方向，而另一方向是与多面镜的扫描方向交叉的方向。 在这种情况下，使排列在与多面镜的扫描方向交叉的方向上的输出面的阵列间距等于曝光图案的分辨率。 在这种情况下，每个激光器的波长可以不超过410nm。
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公开(公告)号：US20050219496A1
公开(公告)日：2005-10-06
申请号：US11075245
申请日：2005-03-09
CPC分类号： G03F7/70791 , G02B26/123 , G03F7/70383 , G03F7/70391 , G03F7/70466
摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.
摘要翻译： 图案曝光方法和图案曝光装置，其中通过廉价的装置提高生产量并且没有低的运行成本。 从多个半导体激光器分别发射的多个激光束的输出面分别布置在两个方向上。 方向之一是与多面镜的扫描方向相同的方向，而另一方向是与多面镜的扫描方向交叉的方向。 在这种情况下，使排列在与多面镜的扫描方向交叉的方向上的输出面的阵列间距等于曝光图案的分辨率。 在这种情况下，每个激光器的波长可以不超过410nm。
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公开(公告)号：US07372478B2
公开(公告)日：2008-05-13
申请号：US11075245
申请日：2005-03-09
CPC分类号： G03F7/70791 , G02B26/123 , G03F7/70383 , G03F7/70391 , G03F7/70466
摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.
摘要翻译： 图案曝光方法和图案曝光装置，其中通过廉价的装置提高生产量并且没有低的运行成本。 从多个半导体激光器分别发射的多个激光束的输出面分别布置在两个方向上。 方向之一是与多面镜的扫描方向相同的方向，而另一方向是与多面镜的扫描方向交叉的方向。 在这种情况下，使排列在与多面镜的扫描方向交叉的方向上的输出面的阵列间距等于曝光图案的分辨率。 在这种情况下，每个激光器的波长可以不超过410nm。
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公开(公告)号：US20060215139A1
公开(公告)日：2006-09-28
申请号：US11353017
申请日：2006-02-14
申请人： Yoshitada Oshida , Yoshitatsu Naito , Mituhiro Suzuki , Tsuyoshi Yamaguchi , Shigenobu Maruyama
发明人： Yoshitada Oshida , Yoshitatsu Naito , Mituhiro Suzuki , Tsuyoshi Yamaguchi , Shigenobu Maruyama
IPC分类号： G03B27/52
CPC分类号： G02B26/12 , G02B26/123 , G03F7/70383 , G03F7/70466 , G03F7/70575 , G03F7/70791
摘要： A maskless exposure method and a maskless exposure apparatus in which maskless exposure can be performed efficiently with high-directivity illumination light, while the exposure efficiency of solder resist can be improved. Blue-violet semiconductor lasers 12A emitting laser beams 1a with a wavelength of 405 nm and ultraviolet semiconductor lasers 12B emitting laser beams 1b with a wavelength of 375 nm are provided to irradiate a substrate 8 with the laser beams 1a and 1b whose optical axes are made coaxial. In this event, one and the same place on the substrate 8 is irradiated with the laser beams 1a and 1b a plurality of times. Thus, the variation in intensity of the laser beams 1a and 1b is averaged.
摘要翻译： 可以通过高方向性照明光有效地进行无掩模曝光的无掩模曝光方法和无掩模曝光装置，同时可以提高阻焊剂的曝光效率。 提供波长为405nm的蓝紫色半导体激光器12A和发射波长为375nm的激光束1b的紫外半导体激光器12B以激光束1a和1照射基板8 b的光轴是同轴的。 在这种情况下，多次地用激光束1a和1b照射基板8上的同一个位置。 因此，激光束1a和1b的强度变化是平均的。
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5.发明申请Device for Changing Pitch Between Light Beam Axes, and Substrate Exposure Apparatus 有权用于改变光束轴之间的间距的装置和基板曝光装置公开(公告)号：US20070279609A1
公开(公告)日：2007-12-06
申请号：US11755361
申请日：2007-05-30
申请人： Yoshitada OSHIDA , Yoshitatsu Naito , Mituhiro Suzuki , Tsuyoshi Yamaguchi , Shigenobu Maruyama
发明人： Yoshitada OSHIDA , Yoshitatsu Naito , Mituhiro Suzuki , Tsuyoshi Yamaguchi , Shigenobu Maruyama
IPC分类号： G03B27/42
CPC分类号： G03F7/70791 , G02B5/045 , G02B17/04 , G02B26/12 , G03F7/7005 , G03F7/70391 , G03F7/704
摘要： A parallel glass which is a prism having a parallelogram-shaped cross section in an x-y direction, and parallel glasses which are prisms having a parallelogram-shaped cross section in the x-y direction and each include grooves formed in one surface in a z direction perpendicular to the x-y direction, are stacked in direct contact with each other such that the grooves are located on the inside, and light trying to enter the grooves is subjected is total reflection, thereby changing incident parallel beams with a pitch of 13 mm into emergent parallel beams with a pitch of 1 mm.
摘要翻译： 在xy方向上具有平行四边形横截面的棱镜的平行玻璃和在xy方向上具有平行四边形横截面的棱镜的平行玻璃，每个平行玻璃包括在垂直于xy方向的az方向的一个表面中形成的凹槽 xy方向彼此直接接触地堆叠，使得凹槽位于内侧，并且试图进入凹槽的光被全反射，从而将具有13mm间距的入射平行光束改变为具有 间距为1毫米。
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6.发明授权Device for changing pitch between light beam axes, and substrate exposure apparatus 有权用于改变光束轴之间的间距的装置和基板曝光装置公开(公告)号：US08089614B2
公开(公告)日：2012-01-03
申请号：US11755361
申请日：2007-05-30
申请人： Yoshitada Oshida , Yoshitatsu Naito , Mituhiro Suzuki , Tsuyoshi Yamaguchi , Shigenobu Maruyama
发明人： Yoshitada Oshida , Yoshitatsu Naito , Mituhiro Suzuki , Tsuyoshi Yamaguchi , Shigenobu Maruyama
IPC分类号： G03B27/53
CPC分类号： G03F7/70791 , G02B5/045 , G02B17/04 , G02B26/12 , G03F7/7005 , G03F7/70391 , G03F7/704
摘要： A parallel glass which is a prism having a parallelogram-shaped cross section in an x-y direction, and parallel glasses which are prisms having a parallelogram-shaped cross section in the x-y direction and each include grooves formed in one surface in a z direction perpendicular to the x-y direction, are stacked in direct contact with each other such that the grooves are located on the inside, and light trying to enter the grooves is subjected is total reflection, thereby changing incident parallel beams with a pitch of 13 mm into emergent parallel beams with a pitch of 1 mm.
摘要翻译： 在xy方向上具有平行四边形横截面的棱镜的平行玻璃和在xy方向上具有平行四边形横截面的棱镜的平行玻璃，每个平行玻璃包括在垂直于xy方向的az方向的一个表面中形成的凹槽 xy方向彼此直接接触地堆叠，使得凹槽位于内侧，并且试图进入凹槽的光被全反射，从而将具有13mm间距的入射平行光束改变为具有 间距为1毫米。
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公开(公告)号：US06460755B1
公开(公告)日：2002-10-08
申请号：US08813577
申请日：1997-03-07
申请人： Kosuke Inoue , Takamichi Suzuki , Hitoshi Odashima , Katsuhiro Iwashita , Tatsuya Yoneda , Michiharu Honda , Katuhisa Tanaka , Tsuyoshi Yamaguchi , Tetsuo Murakami , Asahi Tsuchiya , Yoshitatsu Naito , Mitsuhiro Suzuki , Izumi Hata , Kouji Sajiki
发明人： Kosuke Inoue , Takamichi Suzuki , Hitoshi Odashima , Katsuhiro Iwashita , Tatsuya Yoneda , Michiharu Honda , Katuhisa Tanaka , Tsuyoshi Yamaguchi , Tetsuo Murakami , Asahi Tsuchiya , Yoshitatsu Naito , Mitsuhiro Suzuki , Izumi Hata , Kouji Sajiki
IPC分类号： B23K500
CPC分类号： H05K3/3478 , B23K3/0623 , B23K2101/40 , H01L21/4853 , H01L2224/05568 , H01L2224/05573 , H01L2224/056 , H01L2224/11334 , H01L2224/48091 , H01L2224/48227 , H01L2924/15311 , H01L2924/181 , H05K1/0269 , H05K3/3489 , H05K2203/0338 , H05K2203/041 , H05K2203/082 , H01L2924/00014 , H01L2924/00012
摘要： There are disclosed a solder bump forming method and an apparatus therefor, which achieve a high reliability, and an electronic part, produced by this method and this apparatus, is also disclosed. For each of the step of arraying solder balls, the step of supplying a flux, and the step of mounting the solder balls on a board, it is checked whether or not any solder ball is omitted, and the process is conducted while confirming the condition of the operation, thereby enhancing the reliability and also preventing defective products from being produced.
摘要翻译： 公开了一种实现高可靠性的焊料凸块形成方法及其装置，并且还公开了通过该方法和该装置制造的电子部件。 对于排列焊球的步骤，供给焊剂的步骤以及将焊球安装在板上的步骤，检查是否省略任何焊球，并且在确认条件的同时进行处理 的操作，从而提高可靠性并且还防止不良产品的生产。
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8.发明申请RUBBER COMPOSITION, CROSSLINKED RUBBER COMPOSITION, PNEUMATIC TIRE, AND METHOD FOR PRODUCING ISOBUTYLENE POLYMER 审中-公开橡胶组合物，交联橡胶组合物，气动轮胎和用于生产异丁烯聚合物的方法公开(公告)号：US20140194576A1
公开(公告)日：2014-07-10
申请号：US14232075
申请日：2012-06-29
IPC分类号： C08L9/06 , C08F216/16
CPC分类号： C08F216/165 , B60C1/0016 , C08F110/10 , C08L9/06 , C08L21/00 , C08L23/22 , C08F2500/17 , C08F210/10 , C08F216/125
摘要： A rubber composition containing a rubber component having an olefinic double bond, and an isobutylene polymer having a structural unit represented by the following formula (1) and a structural unit represented by the following formula (2), wherein the content of a low molecular weight substance whose molecular weight is 1000 or less in the isobutylene polymer is 5% by mass or less based on the total amount of the isobutylene polymer. [wherein X represents a divalent group, Y represents a substituted or unsubstituted alicyclic group having an unsaturated bond, and n represents 0 or 1.]
摘要翻译： 一种含有具有烯属双键的橡胶组分的橡胶组合物和具有由下式（1）表示的结构单元的异丁烯聚合物和由下式（2）表示的结构单元，其中低分子量的含量 异丁烯类聚合物中的分子量为1000以下的物质相对于异丁烯系聚合物的总量为5质量％以下。 [式中，X表示二价基，Y表示取代或未取代的具有不饱和键的脂环基，n表示0或1]
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公开(公告)号：US20120258780A1
公开(公告)日：2012-10-11
申请号：US13427401
申请日：2012-03-22
申请人： Tsuyoshi Yamaguchi , Jun Hayashi
发明人： Tsuyoshi Yamaguchi , Jun Hayashi
IPC分类号： A63F13/00
CPC分类号： A63F13/533 , A63F13/44 , A63F13/573 , A63F13/577 , A63F13/812 , A63F2300/305 , A63F2300/308 , A63F2300/638 , A63F2300/8011
摘要： A gaming device includes a release pattern prediction section which determines a prediction release pattern for the release pattern of the flying object to be released by the first personified character by selecting one of the plurality of release patterns stored in the release pattern storing section based on a selecting operation by a user operating the second personified character; and a difficulty adjustment section, which compares the release pattern determined with the prediction release pattern, and reduces the difficulty for the second character to hit back the flying object released by the first character when the release pattern determined and the prediction release pattern match.
摘要翻译： 游戏装置包括释放模式预测部，其通过基于存储在释放模式存储部中的多个释放模式中的一个来确定由第一个性化角色释放的飞行对象的释放模式的预测释放模式 由操作第二个性化角色的用户选择操作; 以及难点调整部，其比较与预测释放模式确定的释放模式，并且当确定了释放模式并且预测释放模式匹配时，降低了第二个角色回击由第一个角色释放的飞行对象的难度。
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公开(公告)号：US20120136130A1
公开(公告)日：2012-05-31
申请号：US13322500
申请日：2010-05-27
IPC分类号： C08F236/20
CPC分类号： C08F210/10 , C08F4/54 , C08F216/12 , C08F4/12
摘要： An isobutylene-based polymer comprising a structural unit represented by the following formula (1): and a structural unit represented by the following formula (2): wherein X represents a divalent group; Y represents a substituted or unsubstituted alicyclic group having an unsaturated bond in the ring; and n represents 0 or 1.
摘要翻译： 包含由下式（1）表示的结构单元的异丁烯类聚合物和由下式（2）表示的结构单元：其中X表示二价基团; Y表示在环中具有不饱和键的取代或未取代的脂环基; n表示0或1。
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