Invention Grant
- Patent Title: Yield optimization in router for systematic defects
- Patent Title (中): 路由器产生优化系统缺陷
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Application No.: US11279262Application Date: 2006-04-11
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Publication No.: US07398485B2Publication Date: 2008-07-08
- Inventor: Jeanne P. Bickford , Markus T. Buehler , Jason D. Hibbeler , Juergen Koehl , Daniel N. Maynard
- Applicant: Jeanne P. Bickford , Markus T. Buehler , Jason D. Hibbeler , Juergen Koehl , Daniel N. Maynard
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Rahman, LLC
- Agent Richard M. Kotulak, Esq.
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Embodiments herein provide a method and computer program product for optimizing router settings to increase IC yield. A method begins by reviewing yield data in an IC manufacturing line to identify structure-specific mechanisms that impact IC yield. Next, the method establishes a structural identifier for each structure-specific mechanism, wherein the structural identifiers include wire codes, tags, and/or unique identifiers. Different structural identifiers are established for wires having different widths. Furthermore, the method establishes a weighting factor for each structure-specific mechanism, wherein higher weighting factors are established for structure-specific mechanisms comprising thick wires proximate to multiple thick wires. The method establishes the structural identifiers and the weighting factors for incidence of spacing between single wide lines, double wide lines, and triple wide lines and for incidence of wires above large metal lands. Subsequently, the router settings are modified based on the structural identifiers and the weighting factors to minimize systematic defects.
Public/Granted literature
- US20070240090A1 YIELD OPTIMIZATION IN ROUTER FOR SYSTEMATIC DEFECTS Public/Granted day:2007-10-11
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