发明授权
- 专利标题: Monitoring a thermal processing system
- 专利标题(中): 监控热处理系统
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申请号: US11278012申请日: 2006-03-30
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公开(公告)号: US07406644B2公开(公告)日: 2008-07-29
- 发明人: Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima
- 申请人: Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Wood, Herron & Evans, LLP
- 主分类号: G01R31/28
- IPC分类号: G01R31/28
摘要:
A method of monitoring a thermal processing system in real-time using a built-in self test (BIST) table to detect, diagnose and/or predict fault conditions and/or degraded performance. The method includes positioning a plurality of wafers in a processing chamber in the thermal processing system, performing a self test process, determining a real-time transient error from a measured transient response and a baseline transient response determined by a BIST rule stored in the BIST table, and comparing the transient error to operational limits and warning limits established by the BIST rule for the self test process.
公开/授权文献
- US20070255991A1 MONITORING A THERMAL PROCESSING SYSTEM 公开/授权日:2007-11-01