发明授权
US07414715B2 Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation 有权
用于通过避免检测器饱和来扩展检测系统的检测范围的系统,电路和方法

Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation
摘要:
Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.
信息查询
0/0