发明授权
US07414715B2 Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation
有权
用于通过避免检测器饱和来扩展检测系统的检测范围的系统,电路和方法
- 专利标题: Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation
- 专利标题(中): 用于通过避免检测器饱和来扩展检测系统的检测范围的系统,电路和方法
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申请号: US11181519申请日: 2005-07-14
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公开(公告)号: US07414715B2公开(公告)日: 2008-08-19
- 发明人: Christian H. Wolters , Anatoly Romanovsky , Alexander Slobodov
- 申请人: Christian H. Wolters , Anatoly Romanovsky , Alexander Slobodov
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Technologies Corp.
- 当前专利权人: KLA-Tencor Technologies Corp.
- 当前专利权人地址: US CA Milpitas
- 代理机构: Baker & McKenzie LLP
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.
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