公开(公告)号：US07436508B2

公开(公告)日：2008-10-14

申请号：US11181228

申请日：2005-07-14

Applicant: Christian H. Wolters ,  Anatoly Romanovsky

Inventor： Christian H. Wolters ,  Anatoly Romanovsky

IPC: G01N21/00

CPC classification number: G01N21/47 ,  G01N21/21 ,  G01N21/9501 ,  G01N21/95607

Abstract: Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. For example, the power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. In addition reducing thermal damage, the systems and methods described herein may be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.

Abstract translation: 提供检查系统，电路和方法以通过在表面检查扫描期间动态地改变提供给样本的入射激光束功率水平来减小对大颗粒的热损伤来增强缺陷检测。 在一个实施例中，检查系统包括用于将光引导到第一功率级的样本的照明子系统，用于检测从样本散射的光的检测子系统和用于动态地改变针对标本的功率水平的功率衰减器子系统 对从样品检测到的散射光。 例如，如果检测到的散射光超过预定的阈值电平，则功率衰减器子系统可以将定向光减少到低于第一功率电平的第二功率电平。 此外，减少热损伤，本文所述的系统和方法可以用于通过提供可变功率检查系统来扩展检查系统的测量检测范围。

公开(公告)号：US08817250B2

公开(公告)日：2014-08-26

申请号：US13226032

申请日：2011-09-06

Applicant: Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani ,  Carmela C. Moreno

Inventor： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

IPC: G01N21/00

CPC classification number: H01L21/6838

Abstract: A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

Abstract translation: 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：US20120062877A1

公开(公告)日：2012-03-15

申请号：US13226032

申请日：2011-09-06

Applicant: Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

Inventor： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

IPC: G01N21/88 ,  G01R31/26

CPC classification number: H01L21/6838

Abstract: A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

Abstract translation: 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：US08042254B1

公开(公告)日：2011-10-25

申请号：US11963271

申请日：2007-12-21

Applicant: Alexander Belyaev ,  Christian H. Wolters ,  Aleksey Petrenko ,  Paul Doyle

Inventor： Alexander Belyaev ,  Christian H. Wolters ,  Aleksey Petrenko ,  Paul Doyle

IPC: B23B31/18 ,  B05C13/00

CPC classification number: H01L21/68785 ,  Y10T29/49998 ,  Y10T279/18

Abstract: An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.

Abstract translation: 公开了一种边缘处理卡盘，用于高速保持和旋转测试基板的系统以及用于夹持旋转基板的方法。 卡盘包括具有中心轴线的板，流体开口和具有以围绕中心轴线对称为特征的不同形貌的顶部表面。 这种形状使得流体开口和足以抵消底物下垂的顶表面周边之间的流体的体积流速显着小于类似但平坦表面的卡盘相似地抵消这种下垂所需的体积流量。 该系统还可以包括主轴电动机和气体系统，其将气体通过流体开口提供到衬底的顶表面和后表面之间的间隙。 通过间隙的流体的径向速度近似恒定。

公开(公告)号：US07777875B2

公开(公告)日：2010-08-17

申请号：US12193469

申请日：2008-08-18

Applicant: Christian H. Wolters ,  Anatoly Romanovsky ,  Alexander Slobodov

Inventor： Christian H. Wolters ,  Anatoly Romanovsky ,  Alexander Slobodov

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/95607 ,  H01J43/30

Abstract: Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.

Abstract translation: 提供检测系统，电路和方法，以通过寻址阳极饱和度作为光电倍增管（PMT）检测器的测量检测范围的限制因素来增强缺陷检测。 根据本发明的一个实施例，用于检查样本的方法包括将光引导到样本并检测从样本散射的光。 检测步骤可以包括监测PMT检测器的阳极电流，并且使用阳极电流检测样品的特征，缺陷或光散射特性，直到阳极电流达到预定阈值。 此后，该方法可以使用PMT的倍增电流来检测样品的特征，缺陷或光散射性质。

公开(公告)号：US20090040511A1

公开(公告)日：2009-02-12

申请号：US12193469

申请日：2008-08-18

Applicant: Christian H. Wolters ,  Anatoly Romanovsky ,  Alexander Slobodov

Inventor： Christian H. Wolters ,  Anatoly Romanovsky ,  Alexander Slobodov

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/95607 ,  H01J43/30

Abstract: Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.

Abstract translation: 提供检测系统，电路和方法，以通过寻址阳极饱和度作为光电倍增管（PMT）检测器的测量检测范围的限制因素来增强缺陷检测。 根据本发明的一个实施例，用于检查样本的方法包括将光引导到样本并检测从样本散射的光。 检测步骤可以包括监测PMT检测器的阳极电流，并且使用阳极电流检测样品的特征，缺陷或光散射特性，直到阳极电流达到预定阈值。 此后，该方法可以使用PMT的倍增电流来检测样品的特征，缺陷或光散射性质。

公开(公告)号：US5858926A

公开(公告)日：1999-01-12

申请号：US702733

申请日：1996-08-23

Applicant: Justin Schwartz ,  Christian H. Wolters ,  Kathleen M. Amm

Inventor： Justin Schwartz ,  Christian H. Wolters ,  Kathleen M. Amm

IPC: H01L39/24

CPC classification number: H01L39/2451 ,  Y10S505/742 ,  Y10S505/783 ,  Y10S505/785

Abstract: The present invention is directed to a process for preparing a HgBaCaCuO superconductor by annealing a precursor mixture comprising a lower member of the homologous HgBaCaCuO superconductor series, a source of calcium and a source of copper. The precursor mixture may further comprise a source of oxygen, a source of rhenium, and, if desired, a source of an additional element selected from the group consisting of halogens and metals other than mercury, barium, calcium, copper and rhenium. The process is particularly effective for preparing (Hg.sub.1-x,Re.sub.x)Ba.sub.2 Ca.sub.2 Cu.sub.3 O.sub.8-y by annealing a precursor mixture containing (Hg.sub.1-x,Re.sub.x)Ba.sub.2 Ca.sub.1 Cu.sub.2 O.sub.6-y at a temperature below about 850.degree. C., wherein x ranges up to about 0.25 and y is a rational number ranging from about negative 1 to about positive 1.

Abstract translation: 本发明涉及通过退火包含同源HgBaCaCuO超导体系列的下部成员，钙源和铜源的前体混合物来制备HgBaCaCuO超导体的方法。 前体混合物可以进一步包含氧源，铼源，如果需要，选自卤素和除汞，钡，钙，铜和铼之外的金属的另外的元素的源。 该方法对于在低于约850℃的温度下退火含有（Hg1-x，Rex）Ba2Ca1Cu2O6-y的前体混合物（其中x范围高达约0.25），制备（Hg1-x，Rex）Ba2Ca2Cu3O8-y是特别有效的 y是从负1到正1的有理数。

公开(公告)号：USPP10308P

公开(公告)日：1998-03-31

申请号：US674716

申请日：1996-07-02

Applicant: Christine P. Wolters ,  Christian H. Wolters

Inventor： Christine P. Wolters ,  Christian H. Wolters

Abstract: A new and distinct variety of Rosemary, Rosmarinus officinalis, was discovered while growing in a planting area located at Guildford, Surrey, England containing plants of the same species. The origin at the new plant otherwise is unknown. The new variety exhibits distinctive decorative lance-shaped bicolored leaves of pale green and white. Good winter hardiness and resistance to diseases have been observed to date. The new variety propagates well from cuttings and is particularly well suited for serving ornamental as well as culinary uses.

公开(公告)号：US07671982B2

公开(公告)日：2010-03-02

申请号：US12251227

申请日：2008-10-14

Applicant: Christian H. Wolters ,  Anatoly Romanovsky

Inventor： Christian H. Wolters ,  Anatoly Romanovsky

IPC: G01N21/00

CPC classification number: G01N21/47 ,  G01N21/21 ,  G01N21/9501 ,  G01N21/95607

Abstract: Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. The power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. The systems and methods described herein may also be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.

Abstract translation: 提供检查系统，电路和方法以通过在表面检查扫描期间动态地改变提供给样本的入射激光束功率水平来减小对大颗粒的热损伤来增强缺陷检测。 在一个实施例中，检查系统包括用于将光引导到第一功率级的样本的照明子系统，用于检测从样本散射的光的检测子系统和用于动态地改变针对标本的功率水平的功率衰减器子系统 对从样品检测到的散射光。 如果检测到的散射光超过预定的阈值电平，则功率衰减器子系统可将定向光减少至低于第一功率电平的第二功率电平。 本文所述的系统和方法还可以用于通过提供可变功率检查系统来扩展检查系统的测量检测范围。

公开(公告)号：US07607647B2

公开(公告)日：2009-10-27

申请号：US11688720

申请日：2007-03-20

Applicant: Guoheng Zhao ,  Alexander Belyaev ,  Christian H. Wolters ,  Paul Andrew Doyle ,  Howard W. Dando ,  Mehdi Vaez-Iravani

Inventor： Guoheng Zhao ,  Alexander Belyaev ,  Christian H. Wolters ,  Paul Andrew Doyle ,  Howard W. Dando ,  Mehdi Vaez-Iravani

IPC: B25B11/00

CPC classification number: B25B11/005 ,  F16C29/025 ,  F16C32/0603 ,  H01L21/67784 ,  H01L21/6838

Abstract: Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.

Abstract translation: 公开了基板处理方法和装置。 基板处理装置包括具有真空预载的非接触式空气轴承卡盘。