发明授权
US07426861B2 Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor 有权
调谐叉式陀螺仪,加速度计和其他具有改进的比例因子的传感器

Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor
摘要:
A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.
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