发明授权
US07426861B2 Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor
有权
调谐叉式陀螺仪，加速度计和其他具有改进的比例因子的传感器
- 专利标题： Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor
- 专利标题（中）： 调谐叉式陀螺仪，加速度计和其他具有改进的比例因子的传感器
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申请号： US11153664申请日： 2005-06-15
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公开(公告)号： US07426861B2公开(公告)日： 2008-09-23
- 发明人: Marc S. Weinberg , Jonathan Bernstein , Jeffrey T. Borenstein , Richard Elliott , Gregory Kirkos , Anthony S. Kourepenis
- 申请人： Marc S. Weinberg , Jonathan Bernstein , Jeffrey T. Borenstein , Richard Elliott , Gregory Kirkos , Anthony S. Kourepenis
- 申请人地址： US MA Cambridge
- 专利权人： The Charles Stark Draper Laboratory, Inc.
- 当前专利权人： The Charles Stark Draper Laboratory, Inc.
- 当前专利权人地址： US MA Cambridge
- 代理机构： Iandiorio Teska & Coleman
- 主分类号： G01P9/04
- IPC分类号： G01P9/04 ; G01P15/125
摘要：
A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.