Invention Grant
- Patent Title: Apparatus and method for heating substrates
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Application No.: US10278615Application Date: 2002-10-22
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Publication No.: US07431585B2Publication Date: 2008-10-07
- Inventor: Jun Zhao , David Quach , Timothy Weidman , Rick J. Roberts , Farhad Moghadam , Dan Maydan
- Applicant: Jun Zhao , David Quach , Timothy Weidman , Rick J. Roberts , Farhad Moghadam , Dan Maydan
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Townsend and Townsend and Crew LLP
- Main IPC: F27D3/00
- IPC: F27D3/00
Abstract:
An apparatus for processing substrates is disclosed. In one embodiment, the apparatus includes a housing and a plurality of stacked cell structures in the housing. An actuator is adapted to move the plurality of stacked cell structures inside of the housing while substrates in the stacked cell structures are being heated.
Public/Granted literature
- US20030138560A1 Apparatus and method for heating substrates Public/Granted day:2003-07-24
Information query
