发明授权
- 专利标题： Sensors for electrochemical, electrical or topographical analysis
- 专利标题（中）： 用于电化学，电气或地形分析的传感器
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申请号： US11233677申请日： 2005-09-22
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公开(公告)号： US07444856B2公开(公告)日： 2008-11-04
- 发明人: Friedrich B. Prinz , Ye Tao , Rainer J. Fasching , Ralph S. Greco , Kyle Hammerick , Robert Lane Smith
- 申请人： Friedrich B. Prinz , Ye Tao , Rainer J. Fasching , Ralph S. Greco , Kyle Hammerick , Robert Lane Smith
- 申请人地址： US CA Palo Alto
- 专利权人： The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人： The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人地址： US CA Palo Alto
- 代理机构： Lumen Patent Firm, Inc.
- 主分类号： G12B21/02
- IPC分类号： G12B21/02 ; G12B21/06 ; G01N13/10 ; G01N13/24 ; B82B1/00
摘要：
Sensors and systems for electrical, electrochemical, or topographical analysis, as well as methods of fabricating these sensors are provided. The sensors include a cantilever and one or more probes, each of which has an electrode at its tip. The tips of the probes are sharp, with a radius of curvature of less than about 50 nm. In addition, the probes have a high aspect ratio of more than about 19:1. The sensors are suitable for both Atomic Force Microscopy and Scanning Electrochemical Microscopy.
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