A method and system for reliability similarity of semiconductor devices. The method includes providing a first plurality of semiconductor devices, providing a second plurality of semiconductor devices, and determining a first reliability associated with the first plurality of semiconductor devices. The first reliability is represented by at least a first probability density function. Additionally, the method includes determining a second reliability associated with the second plurality of semiconductor devices. The second reliability is represented by at least a second probability density function. Moreover, the method includes processing information associated with the first probability density function and the second probability density function, and determining a numerical number based on at least information associated with the first probability density function and the second probability density function. The numerical number is indicative of similarity between the first reliability and the second reliability.