发明授权
- 专利标题: Gate configuration for nanowire electronic devices
- 专利标题(中): 纳米线电子器件的栅极配置
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申请号: US11233398申请日: 2005-09-22
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公开(公告)号: US07473943B2公开(公告)日: 2009-01-06
- 发明人: Shahriar Mostarshed , Jian Chen , Francisco Leon , Yaoling Pan , Linda T. Romano
- 申请人: Shahriar Mostarshed , Jian Chen , Francisco Leon , Yaoling Pan , Linda T. Romano
- 申请人地址: US CA Palo Alto
- 专利权人: Nanosys, Inc.
- 当前专利权人: Nanosys, Inc.
- 当前专利权人地址: US CA Palo Alto
- 代理商 Andrew L. Filler
- 主分类号: H01L29/80
- IPC分类号: H01L29/80
摘要:
Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate. A source contact and a drain contact are coupled to the semiconductor core of the nanowire at respective exposed portions of the semiconductor core.
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