发明授权
- 专利标题: Multi-bit stacked-type non-volatile memory
- 专利标题(中): 多位堆叠型非易失性存储器
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申请号: US11269671申请日: 2005-11-09
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公开(公告)号: US07476929B2公开(公告)日: 2009-01-13
- 发明人: Ching-Nan Hsiao , Chi-Hui Lin , Ying-Cheng Chuang
- 申请人: Ching-Nan Hsiao , Chi-Hui Lin , Ying-Cheng Chuang
- 申请人地址: TW Kueishan, Taoyuan
- 专利权人: Nanya Technology Corporation
- 当前专利权人: Nanya Technology Corporation
- 当前专利权人地址: TW Kueishan, Taoyuan
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: TW092117091A 20030624
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L29/788
摘要:
The present invention discloses a multi-bit stacked-type non-volatile memory having a spacer-shaped floating gate and a manufacturing method thereof. The manufacturing method includes forming a patterned dielectric layer containing arsenic on a semiconductor substrate, wherein the patterned dielectric layer defines an opening as an active area. A dielectric spacer is formed on a side wall of the patterned dielectric layer and a gate dielectric layer is formed on the semiconductor substrate. A source/drain region is formed by thermal driving method making arsenic diffusion from the patterned dielectric layer into the semiconductor substrate. A spacer-shaped floating gate is formed on the side wall of the dielectric spacer and the gate dielectric layer. An interlayer dielectric layer is formed on the spacer-shaped floating gate. A control gate is formed on the interlayer dielectric layer and fills the opening of the active area.
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