Invention Grant
US07494909B2 Method of manufacturing a chip 有权
制造芯片的方法

Method of manufacturing a chip
Abstract:
Provided are a chip, a chip stack, and a method of manufacturing the same. A plurality of chips which each include: at least one pad formed on a wafer; and a metal layer which protrudes up to a predetermined thickness from the bottom of the wafer and is formed in a via hole exposing the bottom of the pad are stacked such that the pad and the metal layer of adjacent chips are bonded. This leads to a simplified manufacturing process, high chip performance and a small footprint for a chip stack.
Public/Granted literature
Information query
Patent Agency Ranking
0/0