Invention Grant
- Patent Title: Method of manufacturing a chip
- Patent Title (中): 制造芯片的方法
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Application No.: US11499116Application Date: 2006-08-03
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Publication No.: US07494909B2Publication Date: 2009-02-24
- Inventor: Chull Won Ju , Byoung Gue Min , Seong Il Kim , Jong Min Lee , Kyung Ho Lee , Young Il Kang
- Applicant: Chull Won Ju , Byoung Gue Min , Seong Il Kim , Jong Min Lee , Kyung Ho Lee , Young Il Kang
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Priority: KR10-2005-0089724 20050927
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/76 ; H01L21/46 ; H01L21/44 ; H01L29/40 ; H01L23/02

Abstract:
Provided are a chip, a chip stack, and a method of manufacturing the same. A plurality of chips which each include: at least one pad formed on a wafer; and a metal layer which protrudes up to a predetermined thickness from the bottom of the wafer and is formed in a via hole exposing the bottom of the pad are stacked such that the pad and the metal layer of adjacent chips are bonded. This leads to a simplified manufacturing process, high chip performance and a small footprint for a chip stack.
Public/Granted literature
- US20070072419A1 Chip, ship stack, and method of manufacturing the same Public/Granted day:2007-03-29
Information query
IPC分类: