发明授权
US07495772B2 Multi-cavity Fabry-Perot interferometric thin-film sensor with built-in temperature compensation 失效
多腔法布里 - 珀罗干涉式薄膜传感器,内置温度补偿

Multi-cavity Fabry-Perot interferometric thin-film sensor with built-in temperature compensation
摘要:
A fiber optic sensor includes at least two Fabry-Perot (FP cavities) defined by at least three partially reflecting surfaces which individually and together are capable of generating different interference spectra which are affected by temperature. One of the FP cavities is formed at an end of the sensor and includes a surface which is capable of supporting a thin film, the optical thickness of which is to be measured. The other FP cavity between the lead-in fiber and the first FP cavity thus does not include the film and can thus independently provide highly accurate temperature information for calibrating the optical length of the second FP cavity and compensation for temperature effects on measurement of the thin film supported thereon, preferably by subtraction of a calibrated temperature-dependent change in optical length of the second FP cavity from the measurement made.
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