公开(公告)号：US07495772B2

公开(公告)日：2009-02-24

申请号：US11413119

申请日：2006-04-28

申请人： Yan Zhang ,  Kristie L. Cooper ,  Anbo Wang

发明人： Yan Zhang ,  Kristie L. Cooper ,  Anbo Wang

IPC分类号： G01B11/02 ,  G01B9/02 ,  G01B11/28

CPC分类号： G01B11/0675 ,  G01B2290/25 ,  G01N21/39 ,  G01N21/45 ,  G01N21/7746 ,  G01N2021/7773 ,  G01N2021/7779

摘要： A fiber optic sensor includes at least two Fabry-Perot (FP cavities) defined by at least three partially reflecting surfaces which individually and together are capable of generating different interference spectra which are affected by temperature. One of the FP cavities is formed at an end of the sensor and includes a surface which is capable of supporting a thin film, the optical thickness of which is to be measured. The other FP cavity between the lead-in fiber and the first FP cavity thus does not include the film and can thus independently provide highly accurate temperature information for calibrating the optical length of the second FP cavity and compensation for temperature effects on measurement of the thin film supported thereon, preferably by subtraction of a calibrated temperature-dependent change in optical length of the second FP cavity from the measurement made.

摘要翻译： 光纤传感器包括由至少三个部分反射表面限定的至少两个法布里 - 珀罗（FP空腔），该至少三个部分反射表面单独地和一起能够产生受温度影响的不同干涉光谱。 FP腔中的一个形成在传感器的端部，并且包括能够支撑其光学厚度被测量的薄膜的表面。 因此，引入光纤和第一FP腔之间的另一个FP腔不包括膜，因此可以独立地提供高精度的温度信息，用于校准第二FP腔的光学长度，并补偿温度对薄膜测量的影响 优选通过从所进行的测量中减去第二FP空腔的光学长度的校准温度依赖性变化来支撑其上的薄膜。