发明授权
- 专利标题： System for monitoring foreign particles, process processing apparatus and method of electronic commerce
- 专利标题（中）： 电子商务监控系统，工艺处理装置及电子商务方法
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申请号： US11727037申请日： 2007-03-23
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公开(公告)号： US07499157B2公开(公告)日： 2009-03-03
- 发明人: Hidetoshi Nishiyama , Minori Noguchi , Tetsuya Watanabe , Takuaki Sekiguchi
- 申请人： Hidetoshi Nishiyama , Minori Noguchi , Tetsuya Watanabe , Takuaki Sekiguchi
- 申请人地址： JP Tokyo
- 专利权人： Hitachi Electronics Engineering Co, Ltd.
- 当前专利权人： Hitachi Electronics Engineering Co, Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Antonelli, Terry, Stout & Kraus, LLP.
- 优先权： JP2002-225692 20020802
- 主分类号： G01N21/00
- IPC分类号： G01N21/00
摘要：
A system for monitoring foreign matter includes a manufacturing line having plural process processing apparatuses, a production management system which manages the processing of workpieces in the manufacturing line, plural optical heads which monitor foreign matter in relation to at least one of the workpieces, and which provide an output signal indicative thereof, and at least one image signal processing unit provided in a lesser number than a number of the plural optical heads for processing the output signal therefrom.
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