公开(公告)号：US20020171446A1

公开(公告)日：2002-11-21

申请号：US10032761

申请日：2001-12-27

申请人： Hitachi Electronics Engineering Co., Ltd

发明人： Keizo Takechi ,  Akio Ohsaki ,  Yoshihiko Hayashi ,  Kazuhiko Murata

IPC分类号： G01R031/26

CPC分类号： G01R31/31924

摘要： A driver circuit integrated with a load current output circuit has a function as a driver for applying a predetermined test waveform to a device under test (DUT), and a function as a load current output for reproducing an actual use situation by receiving the load current to the DUT to judge a response waveform by receiving the response waveform from the DUT. Both functions are made up on a common circuit, operate as the driver circuit when applying the test waveform, and operate as the load current output circuit when judging the response waveform.

摘要翻译： 与负载电流输出电路集成的驱动电路具有作为将预定测试波形施加到被测器件（DUT）的驱动器的功能，以及作为负载电流输出的功能，用于通过接收负载电流来再现实际使用状况 通过接收来自DUT的响应波形来判断响应波形。 这两个功能都由公共电路组成，在应用测试波形时作为驱动电路运行，并在判定响应波形时作为负载电流输出电路工作。

公开(公告)号：US20020036771A1

公开(公告)日：2002-03-28

申请号：US09961513

申请日：2001-09-24

申请人： HITACHI ELECTRONICS ENGINEERING CO., LTD.

发明人： Tatsuya Sato ,  Yuichiro Kato ,  Kenji Mitomo

IPC分类号： G01N021/00

CPC分类号： G01N21/9501

摘要： Light beam is irradiated onto a surface of a substrate to be inspected and scattered lights from the surface of the substrate are received at different light reception angles, so that first and second light detection signals corresponding to the different light reception angles are generated. Reference function defining a correlation in level value between the first and second light detection signals is set, a comparison is made between respective level values of the first and second light detection signals using the reference function as a comparison reference, and it is determined, on the basis of a result of the comparison, which of a plurality of different types of defects, such as a foreign substance and crystal-originated pit, a possible defect present on the surface of the substrate, which is represented by the light detection signals, corresponds to. Also, the level value of a predetermined one of a plurality of the light detection signals is weighted with a predetermined coefficient, and a comparison is made between the weighted level value of the predetermined light detection signal and the level value of the remaining light detection signal, to thereby identify any of a plurality of different types of defects, such as a foreign substance and scratch, present on the surface of the substrate.

摘要翻译： 将光束照射到要检查的基板的表面上，并且以不同的光接收角接收来自基板表面的散射光，从而产生与不同的光接收角对应的第一和第二光检测信号。 设定定义第一和第二光检测信号之间的电平值的相关性的参考功能，使用参考功能作为比较基准比较第一和第二光检测信号的各个电平值，并且确定为 比较结果的基础，由光检测信号表示的多种不同类型的缺陷中的哪一种，例如异物和晶体起源的凹坑，存在于基板的表面上的可能的缺陷， 对应。 此外，多个光检测信号中的预定一个光检测信号的电平值以预定系数加权，并且比较预定光检测信号的加权电平值和剩余光检测信号的电平值 ，从而识别存在于基板表面上的多种不同类型的缺陷，例如异物和划痕。

公开(公告)号：US6138257A

公开(公告)日：2000-10-24

申请号：US115793

申请日：1998-07-15

申请人： Yuji Wada ,  Kaoru Fukuda ,  Yoshio Kamiko ,  Masaaki Mochiduki

发明人： Yuji Wada ,  Kaoru Fukuda ,  Yoshio Kamiko ,  Masaaki Mochiduki

IPC分类号： G01R31/3193 ,  G11C29/56 ,  G01R31/28 ,  G06F11/00

CPC分类号： G01R31/31935 ,  G11C29/56

摘要： Main tester unit tests an IC device for presence of a defect for each of a plurality of addresses of the IC device under predetermined test conditions and stores test results for the individual addresses into a first memory. Curing analysis processing section cures each of the addresses of the IC device determined as defective, on the basis of the test results for the individual addresses stored in the first memory. To this end, the curing analysis processing section may rearrange an address logic of the IC device to replace a physical space of the defective addresses with an extra or redundant address space and thereby place each of the defective addresses in a usable condition. In parallel with the operations by the curing analysis processing section, a defect analysis section acquires, from the main tester unit, the test results for the individual addresses along with data indicative of the predetermined test conditions for storage into a second memory, and analyzes a specific cause of the defect in the IC device on the basis of the stored data in the second memory. With this arrangement, it is possible to acquire information necessary for analyzing the defect in the IC during a curability determining analysis test on a mass production line and thereby can effectively analyze the specific cause of the detected defect.

摘要翻译： 主测试器单元在预定测试条件下测试IC器件以存在IC器件的多个地址中的每一个的缺陷，并将各个地址的测试结果存储到第一存储器中。 基于存储在第一存储器中的各个地址的测试结果，固化分析处理部分固化被确定为有缺陷的IC设备的每个地址。 为此，固化分析处理部分可以重新排列IC设备的地址逻辑，以用额外的或冗余的地址空间替换缺陷地址的物理空间，从而将每个缺陷地址置于可用状态。 与固化分析处理部分的操作并行，缺陷分析部分从主测试器单元获取各个地址的测试结果以及指示用于存储到第二存储器中的预定测试条件的数据，并且分析 基于第二存储器中存储的数据，IC装置中的缺陷的特定原因。 通过这种布置，可以在大规模生产线上的固化性确定分析测试中获取分析IC中的缺陷所需的信息，从而可以有效地分析检测到的缺陷的具体原因。

公开(公告)号：US6039925A

公开(公告)日：2000-03-21

申请号：US123481

申请日：1998-07-28

申请人： Ryoji Nemoto

发明人： Ryoji Nemoto

IPC分类号： G01N21/64 ,  G01N27/447

CPC分类号： G01N27/44721

摘要： The improved fluorescence detector comprises a tubular electrophoretic device through which a sample labelled with four kinds of fluorescent dye is caused to migrate, illumination optics for illuminating the tubular electrophoretic device with exciting light and detection optics for detecting the fluorescence emitted from the sample illuminated with the exciting light and it is characterized in that a plurality of tubular electrophoretic devices (1) are arranged in a row, a plurality of graded-index lenses (9) are arranged parallel to and in the same number as said plurality of tubular electrophoretic devices (1), each lens array being composed of four vertically stacked graded-index lenses, a plurality of bandpass filter arrays (11) are also arranged parallel to and in the same number as said plurality of electrophoretic devices (1), each filter array being composed of four filters arranged vertically in a row, and a light-receiving element of a planar type (13) is provided at the back of the rows of said bandpass filters (11). The apparatus is an efficient and compact multi-color fluorescence detector capable of real-time detection.

摘要翻译： 改进的荧光检测器包括管状电泳装置，通过该管状电泳装置使用四种荧光染料标记的样品迁移，用激发光照射管状电泳装置的照明光学器件和用于检测从被照射的样品发出的荧光的检测光学元件 激光，其特征在于，多个管状电泳装置（1）排列成一行，多个渐变折射率透镜（9）平行排列并与其相同数量的管状电泳装置（ 如图1所示，每个透镜阵列由四个垂直堆叠的折射率透镜组成，多个带通滤光器阵列（11）也被布置为与所述多个电泳装置（1）平行并具有相同数量，每个滤光器阵列 由排列成垂直排列的四个过滤器和平面型（13）的光接收元件组成 k的所述带通滤波器（11）的行。 该装置是一种能够进行实时检测的高效紧凑的多色荧光检测器。

公开(公告)号：US06004487A

公开(公告)日：1999-12-21

申请号：US111376

申请日：1998-07-07

申请人： Kenya Wada ,  Hisayoshi Ichikawa ,  Kazuto Kinoshita ,  Shinji Sugizaki

发明人： Kenya Wada ,  Hisayoshi Ichikawa ,  Kazuto Kinoshita ,  Shinji Sugizaki

IPC分类号： B23K26/06 ,  B23K26/073 ,  B29D11/00 ,  G11B5/84

CPC分类号： G11B5/8404 ,  B23K26/0084 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0734

摘要： Method and apparatus for a disk texturing operation in which laser pulses are successively bombarded against a delimited surface area on the face of a rotating disk, from an optical laser pulse irradiating means which is put in movement in a radial direction relative to the disk to provide a textured zone of a predetermined width on the disk. A pulsed laser beam from a laser light source is adjusted to an optimum power level for an aimed bump diameter. The laser beam is then transformed into an annular beam of a collimated light flux having specified inner and outer diameters, and the resulting laser pulses are successively bombarded on the texturing zone through an objective optical system condensing said laser pulses into a specified spot diameter thereby to form minute bumps of predetermined shape and diameter uniformly on the surface of the disk.

摘要翻译： 一种用于盘纹理操作的方法和装置，其中激光脉冲从光学激光脉冲照射装置相对于旋转盘的表面上的划定的表面区域被连续地轰击，光学激光脉冲照射装置相对于盘沿径向移动，以提供 在盘上具有预定宽度的纹理区域。 来自激光光源的脉冲激光束被调节到用于目标凸起直径的最佳功率水平。 然后将激光束变换成具有规定的内径和外径的准直光束的环形光束，并且通过将所述激光脉冲冷凝成指定光斑直径的物镜光学系统将所得到的激光脉冲连续地轰击在纹理区上，从而 在盘的表面上均匀地形成预定形状和直径的微小凸起。

公开(公告)号：US5976338A

公开(公告)日：1999-11-02

申请号：US837816

申请日：1997-04-22

申请人： Takeshi Fujita ,  Masaharu Kiyama ,  Shin-ichiro Umemura ,  Takamichi Muramatsu ,  Yuusuke Miyazaki ,  Masao Kamahori ,  Noboru Moriya ,  Shokichi Matsunami

发明人： Takeshi Fujita ,  Masaharu Kiyama ,  Shin-ichiro Umemura ,  Takamichi Muramatsu ,  Yuusuke Miyazaki ,  Masao Kamahori ,  Noboru Moriya ,  Shokichi Matsunami

IPC分类号： G01N21/64 ,  C12M1/00 ,  C12N15/00 ,  C12Q1/68 ,  G01N21/03 ,  G01N21/15 ,  G01N27/447 ,  G01N27/26

CPC分类号： G01N27/44704 ,  G01N2021/0389 ,  G01N2021/151 ,  G01N21/64 ,  G01N27/44708 ,  G01N27/44721 ,  G01N27/44734

摘要： Arranging a pair of temperature control units on both sides of gel 1 and arranging light-transmitting slit 134 on one of the elements, irradiation of an excitation beam over the gel 1 and signal detection are practiced through the slit 134. Introducing dry air onto the slit part, mildew occurrence is prevented on the detecting part. Detecting the power level applied to the gel and calculating the temperature of the temperature control units so that the gel temperature might be a predetermined temperature, on the basis of the detected power level, thereafter carrying out the feedback control of the power level, the gel temperature can be controlled appropriately and strictly during electrophoresis in an automatic fluorescent electrophoresis system, so that high-speed analysis can be done highly reproducibly at a higher voltage applied even by SSCP.

摘要翻译： 在凝胶1的两侧配置一对温度控制单元，并且在其中一个元件上布置透光狭缝134，通过狭缝134实现凝胶1上的激发光束的照射和信号检测。将干燥空气引入到 在检测部上防止发霉。 检测施加到凝胶上的功率水平并计算温度控制单元的温度，使得凝胶温度可以基于检测到的功率水平为预定温度，然后进行功率水平的反馈控制，凝胶 可以在自动荧光电泳系统的电泳过程中适当且严格地控制温度，从而即使在SSCP施加的较高电压下也可以高度重复地进行高速分析。

公开(公告)号：US5950802A

公开(公告)日：1999-09-14

申请号：US699343

申请日：1996-08-19

申请人： Toshihiro Kubota

发明人： Toshihiro Kubota

IPC分类号： B23P19/00 ,  H05K13/02 ,  B65G25/00

CPC分类号： H05K13/021

摘要： A transfer mechanism for transferring molded IC device packages or the like between different types of trays which have IC package holder nests in differently spaced arrays. The transfer mechanism includes a suction gripper assembly supported on a horizontally and vertically movable robot arm, and having four suction heads mounted separately on four support blocks on a mounting plate. The four support blocks consist of a first support block fixed in a predetermined reference position on the mounting plate, second and third support blocks movably supported on the mounting plate for movements toward and away from the first support block in perpendicularly intersecting directions, and a fourth support block movably supported on the mounting plate for movements toward and away from the first support block in a diagonal direction following movement of at least one of the second and third support blocks.

摘要翻译： 在具有IC封装保持器的不同类型的托盘之间传送模制的IC器件封装等的转移机构以不同间隔的阵列嵌套。 传送机构包括支撑在水平和垂直移动的机器人臂上的吸力夹持器组件，并且具有分别安装在安装板上的四个支撑块上的四个吸头。 四个支撑块包括固定在安装板上的预定基准位置的第一支撑块，可移动地支撑在安装板上用于在垂直相交方向上朝向和远离第一支撑块移动的第二和第三支撑块，以及第四支撑块 支撑块可动地支撑在安装板上，用于在第二和第三支撑块中的至少一个的运动之后朝向和远离第一支撑块移动。

公开(公告)号：US5909117A

公开(公告)日：1999-06-01

申请号：US925425

申请日：1997-09-08

申请人： Tsutomu Nakadai ,  Osamu Ishiwata

发明人： Tsutomu Nakadai ,  Osamu Ishiwata

IPC分类号： G01R33/12

CPC分类号： G01R33/1207

摘要： Functional devices for inspecting disks are arranged around a turntable at equal spacings of angle 2n.pi./(n+m) in the order of the operations they perform. The turntable is rotated both in forward direction by angle 2n.pi./(n+m) and in reverse direction by angle 2m.pi./(n+m) such that the total angle of rotations in forward direction is equal to that of rotations in reverse direction when the necessary operations have completed without causing the turntable to rotate fully once.

摘要翻译： 用于检查盘的功能装置按照它们执行的操作的顺序以等于角度2n pi /（n + m）的间隔围绕转盘布置。 转盘在正向方向上旋转角度为2n pi /（n + m），反方向旋转角度为2mpi /（n + m），使得正向旋转的总转角等于反向转动的总转角 方向，当必要的操作完成，而不会使转台完全旋转一次。

公开(公告)号：US5903342A

公开(公告)日：1999-05-11

申请号：US629266

申请日：1996-04-08

申请人： Yasuo Yatsugake ,  Takashi Okawa ,  Norihiko Mizutani ,  Shigeharu Iizuka

发明人： Yasuo Yatsugake ,  Takashi Okawa ,  Norihiko Mizutani ,  Shigeharu Iizuka

IPC分类号： G01N21/94 ,  G01N21/88

CPC分类号： G01N21/94

摘要： A wafer surface inspection method and device including a low angle light receiving system having an elevation angle less than 30.degree. with reference to the wafer surface, and a high angle light receiving system having an elevation angle equal to or larger than 30.degree., scans the wafer with a laser beam, receives scattered light to perform extraneous substance detection in response to the scanning, and detects wafer defects only by the high angle light receiving system, and sticking extraneous substances by either the low angle receiving system or by both the low angle light receiving system and the high angle light receiving system.

摘要翻译： 一种晶片表面检查方法和装置，包括相对于晶片表面具有小于30°的仰角的低角度光接收系统和具有等于或大于30°的仰角的高角度光接收系统，扫描 具有激光束的晶片，响应于扫描而接收散射光以进行外来物质检测，并且仅通过高角度光接收系统检测晶片缺陷，并且通过低角度接收系统或低角度接收系统粘附外来物质 光接收系统和高角度光接收系统。

公开(公告)号：US5877857A

公开(公告)日：1999-03-02

申请号：US926011

申请日：1997-09-09

申请人： Osamu Ishiwata ,  Takayuki Ishiguro ,  Keiji Katoh

发明人： Osamu Ishiwata ,  Takayuki Ishiguro ,  Keiji Katoh

IPC分类号： G01B11/24 ,  G11B5/54 ,  G11B5/55 ,  G11B5/82 ,  G11B5/84 ,  G11B19/04 ,  G11B21/10 ,  G11B33/10 ,  G01B9/02

CPC分类号： G01B11/2408 ,  G11B19/04 ,  G11B21/106 ,  G11B5/54 ,  G11B5/82 ,  G11B5/84 ,  G11B33/10 ,  G11B5/5534

摘要： The tester and the test method for testing an eccentricity of a head turnout zone of a magnetic disk determine a turnout zone as acceptable or unacceptable by spirally scanning a turnout zone of a magnetic disk with a laser spot by rotating the magnetic disk and continuously moving either the laser spot radially of the magnetic disk or the magnetic disk radially thereof, obtaining a detection signal having amplitude corresponding to an intensity of a scattering light from the magnetic disk irradiated with the laser spot, extracting a first waveform of the detection signal corresponding to an intermediate region between an inside variation region in which an inside boarder line of the turnout zone radially of the magnetic disk by radial movement of the turnout zone caused by an ecentricity of the turnout zone and an outside variation region in which an outside boarder line of the turnout zone radially of the magnetic disk by the radial movement of the turnout zone caused by the eccentricity of the magnetic disk and a second waveform of either the detection signal adjacent to the first waveform and corresponding to the inside variation region or the detection signal adjacent to the first waveform and corresponding to the outside variation region and detecting an eccntricity of the turnout zone on a basis of a positional relation between the first and second waveforms.

摘要翻译： 用于测试磁盘的磁头转向区域的偏心度的测试器和测试方法通过旋转磁盘来确定通过用激光点螺旋地扫描具有激光光斑的磁盘的投射区域来接受或不可接受的投射区域，并连续移动 磁盘的径向放射状的激光光斑或磁盘的径向地获得具有与激光光点照射的磁盘的散射光的强度对应的振幅的检测信号，提取与该激光光斑对应的检测信号的第一波形 内侧变化区域，其内部变化区域，其中通过轨道出口区域的偏心引起的道岔区域的径向移动，其中径向位于磁盘的迂回区域的内边缘线之间的内侧变化区域和外部变化区域， 由于由偏心引起的岔口区的径向移动，磁盘的径向出射区域 并且对应于与第一波形相邻的内部变化区域或与第一波形相邻的检测信号并且对应于外部变化区域的检测信号的第二波形和检测信号的检测信号的第二波形，并且检测输出区域的响应度 基于第一和第二波形之间的位置关系。