发明授权
- 专利标题: CMOS with dual metal gate
- 专利标题(中): CMOS双金属门
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申请号: US11306748申请日: 2006-01-10
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公开(公告)号: US07504696B2公开(公告)日: 2009-03-17
- 发明人: Huilong Zhu , Zhijiong Luo , Dae-Gyu Park
- 申请人: Huilong Zhu , Zhijiong Luo , Dae-Gyu Park
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Gibb I.P. Law Firm, LLC
- 代理商 Todd M. C. Li, Esq.
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119
摘要:
Embodiments herein present a structure and method to make a CMOS with dual metal gates. Specifically, the CMOS comprises a first gate comprising a first metal and a second gate comprising a second metal. The first gate comprises a portion of a first transistor that is complementary to a second transistor that includes the second gate, wherein the first gate and the second gate are situated on the same substrate. Furthermore, the first metal produces a first threshold voltage characteristic, wherein the first metal comprises tantalum. The second metal produces a second threshold voltage characteristic that differs from the first threshold voltage characteristic, wherein the second metal comprises tungsten.
公开/授权文献
- US20070278590A1 CMOS WITH DUAL METAL GATE 公开/授权日:2007-12-06
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