Invention Grant
US07512518B2 Method for measuring thin layers in solid state devices 失效
测量固态器件薄层的方法

Method for measuring thin layers in solid state devices
Abstract:
A method of using acoustic signals in the form of waves or pulses to non-destructively measure the thickness of a bonding layer sandwiched between and bonding together overlying and underlying materials different from the bonding layer especially when the thickness of the bonding layer is so small that the features (maxima, minima, time position) of the echo from the interface of the bonding layer and the overlying material is indistinguishable, i.e., not independently observable from the features (maxima, minima, time position) of the echo from the interface of the bonding layer and the underlying material.
Public/Granted literature
Information query
Patent Agency Ranking
0/0