Invention Grant
US07514278B2 Test-key for checking interconnect and corresponding checking method
有权
用于检查互连的测试键和相应的检查方法
- Patent Title: Test-key for checking interconnect and corresponding checking method
- Patent Title (中): 用于检查互连的测试键和相应的检查方法
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Application No.: US11162113Application Date: 2005-08-29
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Publication No.: US07514278B2Publication Date: 2009-04-07
- Inventor: Yeh-Sheng Cheng , Hsueh-Wen Wang , Shu-Yun Liao , Chih-Ying Chien , Hsin-Yu Lu , Rui-Huang Cheng
- Applicant: Yeh-Sheng Cheng , Hsueh-Wen Wang , Shu-Yun Liao , Chih-Ying Chien , Hsin-Yu Lu , Rui-Huang Cheng
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Main IPC: G01R31/26
- IPC: G01R31/26 ; H01L21/66
Abstract:
A test key for checking an interconnect structure is described, including a contiguous metal line and multiple conductive plugs on the contiguous metal line, wherein one end of each plug contacts with the contiguous metal line. The other end of at least one plug is not connected to any conductor. In addition, the two ends of the contiguous metal line are connected to different voltages.
Public/Granted literature
- US20070049049A1 TEST-KEY FOR CHECKING INTERCONNECT AND CORRESPONDING CHECKING METHOD Public/Granted day:2007-03-01
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