Invention Grant
- Patent Title: Laterally double-diffused metal oxide semiconductor transistor and method for fabricating the same
- Patent Title (中): 横向双扩散金属氧化物半导体晶体管及其制造方法
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Application No.: US11399427Application Date: 2006-04-07
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Publication No.: US07525153B2Publication Date: 2009-04-28
- Inventor: Cheng-Chi Lin , Shin Su , Chien-Wen Chu , Shih-Chin Lien , Chin-Pen Yeh
- Applicant: Cheng-Chi Lin , Shin Su , Chien-Wen Chu , Shih-Chin Lien , Chin-Pen Yeh
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd
- Current Assignee: Macronix International Co., Ltd
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW94139008A 20051107
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
The present invention discloses a laterally double-diffused metal oxide semiconductor transistor (LDMOS) and a method for fabricating the same. The LDMOS includes a substrate, a first well, a drain, a second well and a source. The substrate includes a first conductive dopant. The first well includes a second conductive dopant and formed in a part of the substrate, and the drain is located in the first well. The second well includes the first conductive dopant and formed in another part of the substrate, and the source located in the second well. The source includes a lightly doped region and a heavily doped region extending downwardly from a top surface of the substrate. The depth of the lightly doped region is more than the depth of the heavily doped region.
Public/Granted literature
- US20070108520A1 Laterally double-diffused metal oxide semiconductor transistor and method for fabricating the same Public/Granted day:2007-05-17
Information query
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