发明授权
- 专利标题: Measurement of effective capacitance
- 专利标题(中): 有效电容的测量
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申请号: US11748207申请日: 2007-05-14
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公开(公告)号: US07525304B1公开(公告)日: 2009-04-28
- 发明人: Yiping Feng , Jianou Shi , Xiafang Zhang
- 申请人: Yiping Feng , Jianou Shi , Xiafang Zhang
- 申请人地址: US CA San Jose
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA San Jose
- 代理机构: Luedeka, Neely & Graham, P.C.
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R31/26
摘要:
A method for determining an effective capacitance of a dielectric material, by forming first and second asymmetrical electrodes entirely within a field of the dielectric material, where the first electrode, the second electrode, and the field of the dielectric material are co-planar, neither the first electrode nor the second electrode are either electrically connected to ground or to each other, applying a first charge Q on the first electrode, measuring a first voltage change V1 on the first electrode, measuring a second voltage change V2 on the second electrode, depositing a second charge Q′ on the second electrode, measuring a third voltage change V3 on the first electrode, measuring a fourth voltage change V4 on the second electrode, calculating a first ground capacitance Cg1 by Cg1=(V2Q′−V4Q)/(V2V3−V1V4), calculating a second ground capacitance Cg2 by Cg2=(V3Q−V1Q′)/(V2V3−V1V4), and calculating an inter-electrode capacitance Cie by Cie=V3Cg1/(V4−V3)=V2Cg2/(V1−V2).
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