发明授权
US07527987B2 Fast localization of electrical failures on an integrated circuit system and method
有权
电气故障在集成电路系统和方法上的快速定位
- 专利标题： Fast localization of electrical failures on an integrated circuit system and method
- 专利标题（中）： 电气故障在集成电路系统和方法上的快速定位
-
申请号： US10538538申请日： 2003-12-11
-
公开(公告)号： US07527987B2公开(公告)日： 2009-05-05
- 发明人: Dennis Ciplickas , Christopher Hess , Sherry Lee , Larg Weiland
- 申请人： Dennis Ciplickas , Christopher Hess , Sherry Lee , Larg Weiland
- 申请人地址： US CA San Jose
- 专利权人： PDF Solutions, Inc.
- 当前专利权人： PDF Solutions, Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： Morrison & Foerster LLP
- 国际申请： PCT/US03/39698 WO 20031211
- 国际公布： WO2004/053944 WO 20040624
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01R31/26
摘要：
Fast localization of electrically measured defects of integrated circuits includes providing information for fabricating a test chip having test structures configured for parallel electrical testing. The test structures on the test chip are electrically tested employing a parallel electrical tester. The results of the electrical testing are analyzed to localize defects on the test chip.