Invention Grant
US07527987B2 Fast localization of electrical failures on an integrated circuit system and method
有权
电气故障在集成电路系统和方法上的快速定位
- Patent Title: Fast localization of electrical failures on an integrated circuit system and method
- Patent Title (中): 电气故障在集成电路系统和方法上的快速定位
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Application No.: US10538538Application Date: 2003-12-11
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Publication No.: US07527987B2Publication Date: 2009-05-05
- Inventor: Dennis Ciplickas , Christopher Hess , Sherry Lee , Larg Weiland
- Applicant: Dennis Ciplickas , Christopher Hess , Sherry Lee , Larg Weiland
- Applicant Address: US CA San Jose
- Assignee: PDF Solutions, Inc.
- Current Assignee: PDF Solutions, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Morrison & Foerster LLP
- International Application: PCT/US03/39698 WO 20031211
- International Announcement: WO2004/053944 WO 20040624
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G01R31/26
Abstract:
Fast localization of electrically measured defects of integrated circuits includes providing information for fabricating a test chip having test structures configured for parallel electrical testing. The test structures on the test chip are electrically tested employing a parallel electrical tester. The results of the electrical testing are analyzed to localize defects on the test chip.
Public/Granted literature
- US20060105475A1 Fast localization of electrical failures on an integrated circuit system and method Public/Granted day:2006-05-18
Information query
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