发明授权
US07528048B2 Planar vertical resistor and bond pad resistor and related method
失效
平面垂直电阻和接合焊盘电阻及相关方法
- 专利标题: Planar vertical resistor and bond pad resistor and related method
- 专利标题(中): 平面垂直电阻和接合焊盘电阻及相关方法
-
申请号: US11954782申请日: 2007-12-12
-
公开(公告)号: US07528048B2公开(公告)日: 2009-05-05
- 发明人: Douglas D. Coolbaugh , Timothy J. Dalton , Daniel C. Edelstein , Ebenezer E. Eshun , Jeffrey P. Gambino , Kevin S. Petrarca , Anthony K. Stamper , Richard P. Volant
- 申请人: Douglas D. Coolbaugh , Timothy J. Dalton , Daniel C. Edelstein , Ebenezer E. Eshun , Jeffrey P. Gambino , Kevin S. Petrarca , Anthony K. Stamper , Richard P. Volant
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Hoffman Warnick LLC
- 代理商 Lisa Jaklitsch
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
Resistors that avoid the problems of miniaturization of semiconductor devices and a related method are disclosed. In one embodiment, a resistor includes a planar resistor material that extends vertically within at least one metal layer of a semiconductor device. In another embodiment, a resistor includes a resistor material layer extending between a first bond pad and a second bond pad of a semiconductor device. The two embodiments can be used alone or together. A related method for generating the resistors is also disclosed.
公开/授权文献
信息查询
IPC分类: