发明授权
US07553386B2 Adhesive with differential optical properties and its application for substrate processing
有权
具有差分光学性能的粘合剂及其在基板加工中的应用
- 专利标题： Adhesive with differential optical properties and its application for substrate processing
- 专利标题（中）： 具有差分光学性能的粘合剂及其在基板加工中的应用
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申请号： US12125687申请日： 2008-05-22
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公开(公告)号： US07553386B2公开(公告)日： 2009-06-30
- 发明人: Daoqiang Lu , Eric J. Li
- 申请人： Daoqiang Lu , Eric J. Li
- 申请人地址： US CA Santa Clara
- 专利权人： Intel Corporation
- 当前专利权人： Intel Corporation
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Schwabe, Williamson & Wyatt, P.C.
- 主分类号： C09K11/06
- IPC分类号： C09K11/06 ; G01N21/64 ; C09J9/00 ; C09J133/12 ; C09J133/08 ; B32B37/14 ; B32B43/00 ; B29C63/48
摘要：
An adhesive adapted with particular optical properties, and its use to couple a substrate to a substrate holder during substrate processing are disclosed. After processing the substrate, the optical properties of the adhesive may be exploited to locate and/or remove adhesive residue that may be present on the substrate.
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