Invention Grant
- Patent Title: Appearance inspection apparatus
- Patent Title (中): 外观检查仪
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Application No.: US11830320Application Date: 2007-07-30
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Publication No.: US07557911B2Publication Date: 2009-07-07
- Inventor: Kenji Oka , Shigeru Matsui
- Applicant: Kenji Oka , Shigeru Matsui
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2006-207780 20060731
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.
Public/Granted literature
- US20080024765A1 Appearance Inspection Apparatus Public/Granted day:2008-01-31
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