发明授权
US07558371B2 Method of generating X-ray diffraction data for integral detection of twin defects in super-hetero-epitaxial materials
有权
产生X射线衍射数据的方法,用于整体检测超异质外延材料中的双缺陷
- 专利标题: Method of generating X-ray diffraction data for integral detection of twin defects in super-hetero-epitaxial materials
- 专利标题(中): 产生X射线衍射数据的方法,用于整体检测超异质外延材料中的双缺陷
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申请号: US12254150申请日: 2008-10-20
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公开(公告)号: US07558371B2公开(公告)日: 2009-07-07
- 发明人: Yeonjoon Park , Sang Hyouk Choi , Glen C. King , James R. Elliott
- 申请人: Yeonjoon Park , Sang Hyouk Choi , Glen C. King , James R. Elliott
- 申请人地址: US DC Washington
- 专利权人: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
- 当前专利权人: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
- 当前专利权人地址: US DC Washington
- 代理商 Linda B. Blackburn; Helen M. Galus
- 主分类号: G01N23/20
- IPC分类号: G01N23/20
摘要:
A method provides X-ray diffraction data suitable for integral detection of a twin defect in a strained or lattice-matched epitaxial material made from components having crystal structures having symmetry belonging to different space groups. The material is mounted in an X-ray diffraction (XRD) system. In one embodiment, the XRD system's goniometer angle Ω is set equal to (θB−β) where θB is a Bragg angle for a designated crystal plane of the alloy that is disposed at a non-perpendicular orientation with respect to the {111) crystal plane, and β is the angle between the designated crystal plane and a {111} crystal plane of one of the epitaxial components. The XRD system's detector angle is set equal to (θB+β). The material can be rotated through an angle of azimuthal rotation φ about the axis aligned with the material. Using the detector, the intensity of the X-ray diffraction is recorded at least at the angle at which the twin defect occurs.
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