发明授权
US07567022B2 Method for forming perovskite type oxide thin film, piezoelectric element, liquid discharge head, and liquid discharge apparatus 失效
用于形成钙钛矿型氧化物薄膜,压电元件,液体排出头和液体排出装置的方法

Method for forming perovskite type oxide thin film, piezoelectric element, liquid discharge head, and liquid discharge apparatus
摘要:
To provide a film forming method capable of obtaining a high-quality perovskite type oxide thin film, piezoelectric element having a piezoelectric substance constituted of the thin film formed by the film forming method, liquid discharge head having the piezoelectric element and liquid discharge apparatus having the liquid discharge head. A method for forming a perovskite type oxide thin film having a composition expressed by (A1x, A2y A3z) (B1j, B2k, B3l, B4m B5n)Op is included, which is a film forming method having a plurality of steps for supplying a material containing the elements onto the substrate, dividing the elements A1 to A3 and B1 to B5 into a plurality of groups and supplying each material containing the elements included in the groups onto the substrate in separate steps.
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