发明授权
US07567344B2 Apparatus and method for characterizing defects in a transparent substrate
有权
用于表征透明基板中的缺陷的装置和方法
- 专利标题： Apparatus and method for characterizing defects in a transparent substrate
- 专利标题（中）： 用于表征透明基板中的缺陷的装置和方法
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申请号： US11729299申请日： 2007-03-28
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公开(公告)号： US07567344B2公开(公告)日： 2009-07-28
- 发明人: Philip Robert LeBlanc , Vitor Marino Schneider , Correy Robert Ustanik
- 申请人： Philip Robert LeBlanc , Vitor Marino Schneider , Correy Robert Ustanik
- 申请人地址： US NY Corning
- 专利权人： Corning Incorporated
- 当前专利权人： Corning Incorporated
- 当前专利权人地址： US NY Corning
- 代理商 Kevin M. Able
- 主分类号： G01N21/00
- IPC分类号： G01N21/00
摘要：
An apparatus and method for detecting defects in a transparent substrate by simultaneously using a combination of bright field and dark field light sources for illuminating the substrate. The apparatus is capable of detecting both inclusions and surface defects simultaneously while the substrate is in motion, simplifying the characterization of substrates in a manufacturing setting.
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