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1.发明授权公开(公告)号：US07567344B2
公开(公告)日：2009-07-28
申请号：US11729299
申请日：2007-03-28
IPC分类号： G01N21/00
CPC分类号： G01N21/896 , G01N2021/8812 , G01N2021/8825 , G01N2021/8835 , G01N2201/06113
摘要： An apparatus and method for detecting defects in a transparent substrate by simultaneously using a combination of bright field and dark field light sources for illuminating the substrate. The apparatus is capable of detecting both inclusions and surface defects simultaneously while the substrate is in motion, simplifying the characterization of substrates in a manufacturing setting.
摘要翻译： 一种用于通过同时使用用于照射衬底的亮场光源和暗场光源的组合来检测透明衬底中的缺陷的装置和方法。 该装置能够在基板运动时同时检测夹杂物和表面缺陷，简化了制造设置中的基板的表征。
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2.发明申请公开(公告)号：US20070263206A1
公开(公告)日：2007-11-15
申请号：US11729299
申请日：2007-03-28
IPC分类号： G01N21/47
CPC分类号： G01N21/896 , G01N2021/8812 , G01N2021/8825 , G01N2021/8835 , G01N2201/06113
摘要： An apparatus and method for detecting defects in a transparent substrate by simultaneously using a combination of bright field and dark field light sources for illuminating the substrate. The apparatus is capable of detecting both inclusions and surface defects simultaneously while the substrate is in motion, simplifying the characterization of substrates in a manufacturing setting.
摘要翻译： 一种用于通过同时使用用于照射衬底的亮场光源和暗场光源的组合来检测透明衬底中的缺陷的装置和方法。 该装置能够在基板运动时同时检测夹杂物和表面缺陷，简化了制造设置中的基板的表征。
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3.发明授权公开(公告)号：US09488597B2
公开(公告)日：2016-11-08
申请号：US13307418
申请日：2011-11-30
IPC分类号： G01N21/958 , G01N21/94
CPC分类号： G01N21/958 , G01N21/94
摘要： A method for determining surface quality for a glass surface is provided. The method includes depositing a pattern of drops over the glass surface using a drop dispensing apparatus. Adjacent drops have a predetermined deposit size and a predetermined deposit spacing. Drop information for the pattern of drops is generated using a vision apparatus. An out-of-parameter condition is detected by analyzing the drop information and an indication of the out-of-parameter condition is provided.
摘要翻译： 提供了一种用于确定玻璃表面的表面质量的方法。 该方法包括使用液滴分配装置在玻璃表面上沉积液滴图案。 相邻的液滴具有预定的沉积尺寸和预定的沉积间距。 使用视觉装置产生滴液图案的丢弃信息。 通过分析丢弃信息来检测出超出参数的条件，并提供失去参数条件的指示。
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4.发明申请APPARATUS AND METHODS FOR DETERMINING SURFACE COMPLIANCE FOR A GLASS SURFACE 有权用于确定玻璃表面的表面符合性的装置和方法公开(公告)号：US20130135459A1
公开(公告)日：2013-05-30
申请号：US13307418
申请日：2011-11-30
IPC分类号： H04N7/18
CPC分类号： G01N21/958 , G01N21/94
摘要： A method for determining surface quality for a glass surface is provided. The method includes depositing a pattern of drops over the glass surface using a drop dispensing apparatus. Adjacent drops have a predetermined deposit size and a predetermined deposit spacing. Drop information for the pattern of drops is generated using a vision apparatus. An out-of-parameter condition is detected by analyzing the drop information and an indication of the out-of-parameter condition is provided.
摘要翻译： 提供了一种用于确定玻璃表面的表面质量的方法。 该方法包括使用液滴分配装置在玻璃表面上沉积液滴图案。 相邻的液滴具有预定的沉积尺寸和预定的沉积间距。 使用视觉装置产生滴液图案的丢弃信息。 通过分析丢弃信息来检测出超出参数的条件，并提供失去参数条件的指示。
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公开(公告)号：US08904822B2
公开(公告)日：2014-12-09
申请号：US13669994
申请日：2012-11-06
CPC分类号： C03B17/064 , C03B17/067 , C03C23/0025
摘要： A thickness of at least one preselected portion of a substrate, such as glass substrate for example, is controlled. A laser beam is directed to the at least one preselected portion of the substrate in a viscous state, thereby increasing a temperature and reducing a viscosity of the at least one preselected portion of the substrate in a viscous state sufficiently to cause the at least one preselected portion of the glass substrate to attain a desired thickness. The laser beam after it is generated can be directed to a reflecting surface from which the laser beam is reflected to the at least one preselected portion of the substrate in the viscous state. The substrate can comprise a glass ribbon produced in a downdraw glass forming process for example, and the laser beam can be directed onto a plurality of preselected portions of the glass ribbon.
摘要翻译： 对诸如玻璃基板的基板的至少一个预选部分的厚度进行控制。 激光束以粘性状态被引导到衬底的至少一个预选部分，从而在粘性状态下充分地增加温度并降低衬底的至少一个预选部分的粘度，以使得至少一个预选 玻璃基板的一部分以达到期望的厚度。 产生之后的激光束可以被引导到反射表面，激光束从该反射表面被反射到粘性状态的基底的至少一个预选部分。 衬底可以包括以例如下拉玻璃形成工艺制造的玻璃带，并且激光束可以被引导到玻璃带的多个预选部分上。
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公开(公告)号：US20140123703A1
公开(公告)日：2014-05-08
申请号：US13669994
申请日：2012-11-06
CPC分类号： C03B17/064 , C03B17/067 , C03C23/0025
摘要： A thickness of at least one preselected portion of a substrate, such as glass substrate for example, is controlled. A laser beam is directed to the at least one preselected portion of the substrate in a viscous state, thereby increasing a temperature and reducing a viscosity of the at least one preselected portion of the substrate in a viscous state sufficiently to cause the at least one preselected portion of the glass substrate to attain a desired thickness. The laser beam after it is generated can be directed to a reflecting surface from which the laser beam is reflected to the at least one preselected portion of the substrate in the viscous state. The substrate can comprise a glass ribbon produced in a downdraw glass forming process for example, and the laser beam can be directed onto a plurality of preselected portions of the glass ribbon.
摘要翻译： 对诸如玻璃基板的基板的至少一个预选部分的厚度进行控制。 激光束以粘性状态被引导到衬底的至少一个预选部分，从而在粘性状态下充分地增加温度并降低衬底的至少一个预选部分的粘度，以使得至少一个预选 玻璃基板的一部分以达到期望的厚度。 产生之后的激光束可以被引导到反射表面，激光束从该反射表面被反射到粘性状态的基底的至少一个预选部分。 衬底可以包括以例如下拉玻璃形成工艺制造的玻璃带，并且激光束可以被引导到玻璃带的多个预选部分上。
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公开(公告)号：US20090213386A1
公开(公告)日：2009-08-27
申请号：US12070844
申请日：2008-02-21
CPC分类号： G01B11/2441 , G01B9/0201 , G01B9/02057 , G01B9/0209 , G01B2290/70 , G01N21/95 , G01N2021/9513
摘要： An apparatus for measuring surface topography of an object includes an optical arrangement capable of directing a first light beam at a surface of the object, providing a second light beam coherent with and spatially phase-shifted relative to the first light beam, and generating an interference beam from the second light beam and a reflection of the first light beam from the surface of the object. The apparatus further includes at least one line scan sensor for detecting and measuring the interference beam.
摘要翻译： 一种用于测量物体的表面形貌的装置包括能够将第一光束引导到物体表面的光学装置，提供与第一光束相干并在空间上相对于第一光束的第二光束，并产生干涉 来自第二光束的光束和来自物体表面的第一光束的反射。 该装置还包括用于检测和测量干涉光束的至少一个线扫描传感器。
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公开(公告)号：US07821647B2
公开(公告)日：2010-10-26
申请号：US12070844
申请日：2008-02-21
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/0201 , G01B9/02057 , G01B9/0209 , G01B2290/70 , G01N21/95 , G01N2021/9513
摘要： An apparatus for measuring surface topography of an object includes an optical arrangement capable of directing a first light beam at a surface of the object, providing a second light beam coherent with and spatially phase-shifted relative to the first light beam, and generating an interference beam from the second light beam and a reflection of the first light beam from the surface of the object. The apparatus further includes at least one line scan sensor for detecting and measuring the interference beam.
摘要翻译： 一种用于测量物体的表面形貌的装置包括能够将第一光束引导到物体表面的光学装置，提供与第一光束相干并在空间上相对于第一光束的第二光束，并产生干涉 来自第二光束的光束和来自物体表面的第一光束的反射。 该装置还包括用于检测和测量干涉光束的至少一个线扫描传感器。
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公开(公告)号：US07800749B2
公开(公告)日：2010-09-21
申请号：US11809091
申请日：2007-05-31
IPC分类号： G01N21/00
CPC分类号： G01N21/958 , G01N21/896
摘要： A method for inspecting a transparent substrate provides an index-matching fluid between an index-matched optical coupler and a surface of the transparent substrate. The method repeats, at two or more positions along the surface of the transparent substrate, steps of illuminating an inspection volume within the transparent substrate by directing a ribbon of light through the optical coupler and into the transparent substrate and detecting scattered light from the inspection volume at a detector that is optically conjugate with the inspection volume.
摘要翻译： 用于检查透明基板的方法在折射率匹配的光耦合器和透明基板的表面之间提供折射率匹配流体。 该方法在透明基板的表面的两个以上的位置上重复，通过将光带导入透明基板并检测来自检查体的散射光来照射透明基板内的检查体积的步骤 在与检查体积光学共轭的检测器处。
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公开(公告)号：US20090237654A1
公开(公告)日：2009-09-24
申请号：US12469914
申请日：2009-05-21
IPC分类号： G01N21/00
CPC分类号： G01B11/2441 , G01B11/306
摘要： A method of measuring the topography of a large, thin, non-flat specular substrate in a production environment with minimal movement of a majority of the measurement apparatus. A gimbal-mounted reflecting element is used to steer a short coherence length probe beam such that the probe beam is substantially perpendicular to a local surface of the substrate. The probe beam and the reference beam are combined and the resulting interference pattern used to characterize defects on the local surface.
摘要翻译： 一种在生产环境中测量大，薄，非平面镜面基底的形貌的方法，其中大部分测量装置的移动最小。 使用万向节安装的反射元件来引导短的相干长度的探针光束，使得探针光束基本上垂直于衬底的局部表面。 探测光束和参考光束被组合，并且所得到的干涉图案用于表征局部表面上的缺陷。
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