发明授权
- 专利标题: Electrochemical processing of conductive surface
- 专利标题(中): 导电表面的电化学处理
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申请号: US11445594申请日: 2006-06-01
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公开(公告)号: US07572354B2公开(公告)日: 2009-08-11
- 发明人: Cyprian Emeka Uzoh , Homayoun Talieh , Bulent Basol , Douglas W. Young
- 申请人: Cyprian Emeka Uzoh , Homayoun Talieh , Bulent Basol , Douglas W. Young
- 申请人地址: US CA San Jose
- 专利权人: Novellus Systems, Inc.
- 当前专利权人: Novellus Systems, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 主分类号: C25B9/00
- IPC分类号: C25B9/00 ; C25D7/00
摘要:
The present invention relates to methods and apparatus for plating a conductive material on a semiconductor substrate by rotating pad or blade type objects in close proximity to the substrate, thereby eliminating/reducing dishing and voids. This is achieved by providing pad or blade type objects mounted on cylindrical anodes or rollers and applying the conductive material to the substrate using the electrolyte solution disposed on or through the pads, or on the blades. In one embodiment of the invention, the pad or blade type objects are mounted on the cylindrical anodes and rotated about a first axis while the workpiece may be stationary or rotate about a second axis, and metal from the electrolyte solution is deposited on the workpiece when a potential difference is applied between the workpiece and the anode. In another embodiment of the present invention, the plating apparatus includes an anode plate spaced apart from the cathode workpiece. Upon application of power to the anode plate and the cathode workpiece, the electrolyte solution disposed in the plating apparatus is used to deposit the conductive material on the workpiece surface using cylindrical rollers having the pad or blade type objects.
公开/授权文献
- US20060219573A1 Apparatus with conductive pad for electroprocessing 公开/授权日:2006-10-05
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