Invention Grant
- Patent Title: Phase change memory device and fabricating method therefor
- Patent Title (中): 相变存储器件及其制造方法
-
Application No.: US11479497Application Date: 2006-06-30
-
Publication No.: US07598113B2Publication Date: 2009-10-06
- Inventor: Wei-Su Chen , Yi-Chan Chen , Wen-Han Wang , Hong-Hui Hsu , Chien-Min Lee , Yen Chuo , Te-Sheng Chao , Min-Hung Lee
- Applicant: Wei-Su Chen , Yi-Chan Chen , Wen-Han Wang , Hong-Hui Hsu , Chien-Min Lee , Yen Chuo , Te-Sheng Chao , Min-Hung Lee
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Morris, Manning & Martin LLP
- Agent Tim Tingkang Xia
- Priority: TW94146978A 20051228
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L45/00

Abstract:
A phase change memory device and fabricating method are provided. A disk-shaped phase change layer is buried within the insulating material. A center via and ring via are formed by a lithography. The center via is located in the center of the phase change layer and passes through the phase change layer, and the ring via takes the center via as a center. A heating electrode within the center via performs Joule heating of the phase change layer, and the contact area between the phase change layer and the heating electrode is reduced by controlling the thickness of the phase change layer. Furthermore, a second electrode within the ring via dissipates the heat transmitted to the contact interface between the phase change layers, so as to avoid transmitting the heat to the etching boundary at the periphery of the phase change layer.
Public/Granted literature
- US20070148855A1 Phase change memory device and fabricating method therefor Public/Granted day:2007-06-28
Information query
IPC分类: