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US07625771B2 Method of reducing insertion loss in a transition region between a plurality of input or output waveguides to a free space coupler region 有权
将多个输入或输出波导之间的过渡区域中的插入损耗减小到自由空间耦合器区域的方法

Method of reducing insertion loss in a transition region between a plurality of input or output waveguides to a free space coupler region
Abstract:
A method for reducing insertion loss in a transition region between a plurality of input or output waveguides to a free space coupler region in a photonic integrated circuit (PIC) includes the steps of forming a passivation layer over the waveguides and region and forming the passivation overlayer such that it monotonically increases in thickness through the transition region to the free space coupler region.
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