发明授权
US07632630B2 Dyed photoresists and methods and articles of manufacture comprising same
失效
染色的光致抗蚀剂以及包含其的方法和制品
- 专利标题： Dyed photoresists and methods and articles of manufacture comprising same
- 专利标题（中）： 染色的光致抗蚀剂以及包含其的方法和制品
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申请号： US11418520申请日： 2006-05-03
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公开(公告)号： US07632630B2公开(公告)日： 2009-12-15
- 发明人: James Michael Mori , James W. Thackeray , Roger F. Sinta , Rosemary Bell , Robin L. Miller-Fahey , Timothy G. Adams , Thomas M. Zydowsky , Edward K. Pavelchek , Manual doCanto
- 申请人： James Michael Mori , James W. Thackeray , Roger F. Sinta , Rosemary Bell , Robin L. Miller-Fahey , Timothy G. Adams , Thomas M. Zydowsky , Edward K. Pavelchek , Manual doCanto
- 申请人地址： US MA Marlborough
- 专利权人： Rohm and Haas Electronic Materials LLC
- 当前专利权人： Rohm and Haas Electronic Materials LLC
- 当前专利权人地址： US MA Marlborough
- 代理机构： Edwards Angell Palmer & Dodge LLP
- 代理商 Peter F. Corless; Darryl P. Frickey
- 主分类号： G03F7/30
- IPC分类号： G03F7/30 ; G03F7/004
摘要：
The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a dye material that contains one or more chromophores that can reduce undesired reflections of exposure radiation. Preferred dye compounds are polymeric materials that include one or more chromophores such as anthracene and other polycyclic moieties that effectively absorb deep UV exposure radiation.
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