Invention Grant
US07633360B2 MEMS resonator having an inner element and an outer element that flex
有权
具有内部元件和外部元件的MEMS谐振器
- Patent Title: MEMS resonator having an inner element and an outer element that flex
- Patent Title (中): 具有内部元件和外部元件的MEMS谐振器
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Application No.: US11535807Application Date: 2006-09-27
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Publication No.: US07633360B2Publication Date: 2009-12-15
- Inventor: Jason W. Weigold
- Applicant: Jason W. Weigold
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H03H9/46 ; H03H9/50 ; H03B5/30
Abstract:
A MEMS resonator has an outer element having an inner surface, the inner surface defining an area and a inner element coupled to the outer element and disposed within the area. The MEMS resonator also has an actuation electrode, in communication with the outer element, for generating electrostatic signals that cause the inner element to flex in a periodic manner.
Public/Granted literature
- US20070070821A1 MEMS Resonator Public/Granted day:2007-03-29
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