Invention Grant
- Patent Title: Solder bump structure and method of manufacturing same
- Patent Title (中): 焊接凸块结构及其制造方法
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Application No.: US11592220Application Date: 2006-11-03
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Publication No.: US07659632B2Publication Date: 2010-02-09
- Inventor: Pei-Haw Tsao , Bill Kiang , Pao-Kang Niu , Liang-Chen Lin , I-Tai Liu
- Applicant: Pei-Haw Tsao , Bill Kiang , Pao-Kang Niu , Liang-Chen Lin , I-Tai Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Seminconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Seminconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
Solder bump structures for semiconductor device packaging is provided. In one embodiment, a semiconductor device comprises a substrate having a bond pad and a first passivation layer formed thereabove, the first passivation layer having an opening therein exposing a portion of the bond pad. A metal pad layer is formed on a portion of the bond pad, wherein the metal pad layer contacts the bond pad. A second passivation layer is formed above the metal pad layer, the second passivation layer having an opening therein exposing a portion of the metal pad layer. A patterned and etched polyimide layer is formed on a portion of the metal pad layer and a portion of the second passivation layer. A conductive layer is formed above a portion of the etched polyimide layer and a portion of the metal pad layer, wherein the conductive layer contacts the metal pad layer. A conductive bump structure is connected to the conductive layer.
Public/Granted literature
- US20080122086A1 Solder bump structure and method of manufacturing same Public/Granted day:2008-05-29
Information query
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