Test structure
    4.
    发明授权
    Test structure 有权
    测试结构

    公开(公告)号:US07498680B2

    公开(公告)日:2009-03-03

    申请号:US11634588

    申请日:2006-12-06

    Abstract: A test structure to detect vertical leakage in a multi-layer flip chip pad stack or similar semiconductor device. The test structure is integrated into the semiconductor device when it is fabricated. A metal layer includes at least two portions that are electrically isolated from each other; one portion being disposed under a test pad, and another portion being disposed under a pad associated with a pad structure being tested. The metal layer in most cases is separated from a top metal layer directly underlying the pads by an inter-metal dielectric (IMD) layer. A metal layer portion underlying the pad to be tested forms a recess in which a conductive member is disposed without making electrical contact. The conductive line is electrically coupled to a test portion of the same or, alternately, of a different metal layer. The test structure may be implemented on multiple layers, with recesses portions underlying the same or different pads.

    Abstract translation: 用于检测多层倒装芯片堆栈或类似半导体器件中的垂直泄漏的测试结构。 测试结构在制造时被集成到半导体器件中。 金属层包括彼此电隔离的至少两个部分; 一部分设置在测试垫下方,另一部分设置在与待测试的垫结构相关联的垫下方。 大多数情况下,金属层通过金属间电介质(IMD)层与直接位于焊盘下方的顶部金属层分离。 待测试垫下面的金属层部分形成凹部,其中布置导电部件而不进行电接触。 导电线电耦合到相同或交替地不同金属层的测试部分。 测试结构可以在多层上实现,其中凹部位于相同或不同的垫下。

    Method for forming semiconductor ball grid array package
    10.
    发明申请
    Method for forming semiconductor ball grid array package 审中-公开
    半导体球栅阵列封装形成方法

    公开(公告)号:US20080274569A1

    公开(公告)日:2008-11-06

    申请号:US12217949

    申请日:2008-07-10

    Abstract: A method for forming a semiconductor package provides a ball grid array, BGA, formed on a package substrate. The apices of the solder balls of the BGA are all at the same height, even if the package substrate is non-planar. Different solder ball pad sizes are used and tailored to compensate for non-planarity of the package substrate that may result from thermal warpage. Larger size solder ball pads are formed at relatively-high locations on the package substrate. An equal amount of solder is formed on each of the solder ball pads to produce solder balls having different heights and coplanar apices.

    Abstract translation: 形成半导体封装的方法提供形成在封装衬底上的球栅阵列BGA。 即使封装衬底是非平面的,BGA的焊球的顶点都处于相同的高度。 不同的焊球尺寸被使用和定制以补偿可能由热翘曲引起的封装衬底的非平面性。 较大尺寸的焊球焊盘形成在封装衬底上相对较高的位置处。 在每个焊球垫上形成等量的焊料,以产生具有不同高度和共面顶点的焊球。

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