发明授权
US07665416B2 Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles
有权
用于在等离子体中产生激发和/或离子化颗粒的装置和用于产生电离颗粒的方法
- 专利标题： Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles
- 专利标题（中）： 用于在等离子体中产生激发和/或离子化颗粒的装置和用于产生电离颗粒的方法
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申请号： US11450871申请日： 2006-06-12
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公开(公告)号： US07665416B2公开(公告)日： 2010-02-23
- 发明人: Alexander Gschwandtner , Josef Mathuni , Alexander Mattheus , Stephan Schneider , Jürgen Sellmaier , Heinz Steinhardt
- 申请人： Alexander Gschwandtner , Josef Mathuni , Alexander Mattheus , Stephan Schneider , Jürgen Sellmaier , Heinz Steinhardt
- 申请人地址： DE Taufkirchen
- 专利权人： R3T GmbH Rapid Reactive Radicals Technology
- 当前专利权人： R3T GmbH Rapid Reactive Radicals Technology
- 当前专利权人地址： DE Taufkirchen
- 代理机构： Baker & Hostetler LLP
- 优先权： DE10358329 20031212
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; H01J7/24
摘要：
An apparatus is described for generating excited and/or ionized particles in a plasma with a generator for generating an electromagnetic wave and an excitation chamber with a plasma zone in which the excited and/or ionized particles are formed. At least one excitation chamber is arranged in an insulating material off-center relative to a ring-cylindrical outer conductor.
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