Invention Grant
US07665416B2 Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles
有权
用于在等离子体中产生激发和/或离子化颗粒的装置和用于产生电离颗粒的方法
- Patent Title: Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles
- Patent Title (中): 用于在等离子体中产生激发和/或离子化颗粒的装置和用于产生电离颗粒的方法
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Application No.: US11450871Application Date: 2006-06-12
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Publication No.: US07665416B2Publication Date: 2010-02-23
- Inventor: Alexander Gschwandtner , Josef Mathuni , Alexander Mattheus , Stephan Schneider , Jürgen Sellmaier , Heinz Steinhardt
- Applicant: Alexander Gschwandtner , Josef Mathuni , Alexander Mattheus , Stephan Schneider , Jürgen Sellmaier , Heinz Steinhardt
- Applicant Address: DE Taufkirchen
- Assignee: R3T GmbH Rapid Reactive Radicals Technology
- Current Assignee: R3T GmbH Rapid Reactive Radicals Technology
- Current Assignee Address: DE Taufkirchen
- Agency: Baker & Hostetler LLP
- Priority: DE10358329 20031212
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01J7/24
Abstract:
An apparatus is described for generating excited and/or ionized particles in a plasma with a generator for generating an electromagnetic wave and an excitation chamber with a plasma zone in which the excited and/or ionized particles are formed. At least one excitation chamber is arranged in an insulating material off-center relative to a ring-cylindrical outer conductor.
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