发明授权
- 专利标题: Process for making an on-chip vacuum tube device
- 专利标题(中): 制造片上真空管装置的方法
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申请号: US11649197申请日: 2007-01-03
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公开(公告)号: US07670203B2公开(公告)日: 2010-03-02
- 发明人: Peter Ledel Gammel , Richard Edwin Howard , Omar Daniel Lopez , Wei Zhu
- 申请人: Peter Ledel Gammel , Richard Edwin Howard , Omar Daniel Lopez , Wei Zhu
- 申请人地址: US PA Allentown
- 专利权人: Agere Systems Inc.
- 当前专利权人: Agere Systems Inc.
- 当前专利权人地址: US PA Allentown
- 主分类号: H01J9/02
- IPC分类号: H01J9/02 ; H01J9/18 ; H01J1/02
摘要:
A method of making a microelectromechanical microwave vacuum tube device is disclosed. The device is formed by defining structural regions and sacrificial regions in a substrate. The structural regions have flexural members. The substrate is treated to remove the sacrificial regions and release the structural regions such that the structural regions are moveable by the flexural members. The structural regions include a device cathode, a device grid or both a device cathode and a device grid. The cathode comprises electron emitters. The device further includes an output structure where amplified microwave power is removed from the device. In the method, the cathode surface and the grid surface are moved to a position where they are substantially parallel to each other and substantially perpendicular to the substrate. The device further comprises an anode that is substantially parallel to the cathode surface and the grid surface.
公开/授权文献
- US20070293115A1 Process for making an on-chip vacuum tube device 公开/授权日:2007-12-20