发明授权
- 专利标题： Catoptric objectives and systems using catoptric objectives
- 专利标题（中）： 使用反射目标的目标和系统
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申请号： US11317851申请日： 2005-12-22
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公开(公告)号： US07682031B2公开(公告)日： 2010-03-23
- 发明人: Hans-Jurgen Mann , David Shafer , Wilhelm Ulrich
- 申请人： Hans-Jurgen Mann , David Shafer , Wilhelm Ulrich
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT AG
- 当前专利权人： Carl Zeiss SMT AG
- 当前专利权人地址： DE Oberkochen
- 代理机构： Fish & Richardson P.C.
- 优先权： DE102004063313 20041223; DE102005042005 20050905
- 主分类号： G02B5/10
- IPC分类号： G02B5/10
摘要：
In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
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