发明授权
US07687228B2 Antireflection film composition and patterning process using the same 有权
防反射膜组合物和使用其的图案化工艺

Antireflection film composition and patterning process using the same
摘要:
An antireflection film composition, wherein an etching speed is fast, thus, when used as a resist lower layer, a film loss of a resist pattern and deformation of the pattern during etching can be minimized, and because of a high crosslinking density, a dense film can be formed after thermal crosslinking, thus, mixing with an upper layer resist can be prevented and the resist pattern after development is good is provided. The antireflection film composition comprising; at least a polymer having a repeating unit represented by the following general formula (I).
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