Invention Grant
- Patent Title: Laser facet passivation
- Patent Title (中): 激光刻面钝化
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Application No.: US11277602Application Date: 2006-03-27
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Publication No.: US07687291B2Publication Date: 2010-03-30
- Inventor: Greg Charache , John Hostetler , Ching-Long Jiang , Raymond J. Menna , Radosveta Radionova , Robert W. Roff , Holger Schlüter
- Applicant: Greg Charache , John Hostetler , Ching-Long Jiang , Raymond J. Menna , Radosveta Radionova , Robert W. Roff , Holger Schlüter
- Applicant Address: US NJ Cranbury
- Assignee: Trumpf Photonics Inc.
- Current Assignee: Trumpf Photonics Inc.
- Current Assignee Address: US NJ Cranbury
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Methods of preparing front and back facets of a diode laser include controlling an atmosphere within a first chamber, such that an oxygen content and a water vapor content are controlled to within predetermined levels and cleaving the diode laser from a wafer within the controlled atmosphere of the first chamber to form a native oxide layer hating a predetermined thickness on the front and back facets of the diode laser. After cleavage, the diode laser is transported from the first chamber to a second chamber within a controlled atmosphere, the native oxide layer on the front and back facets of the diode laser is partially removed, an amorphous surface layer is formed on the front and back facets of the diode laser, and the front and back facets of the diode laser are passivated.
Public/Granted literature
- US20060216842A1 Laser Facet Passivation Public/Granted day:2006-09-28
Information query
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