发明授权
- 专利标题： Techniques for providing a multimode ion source
- 专利标题（中）： 提供多模离子源的技术
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申请号： US11966312申请日： 2007-12-28
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公开(公告)号： US07700925B2公开(公告)日： 2010-04-20
- 发明人: Svetlana Radovanov , Bon Woong Koo , Frank Sinclair , Victor M. Benveniste
- 申请人： Svetlana Radovanov , Bon Woong Koo , Frank Sinclair , Victor M. Benveniste
- 申请人地址： US MA Gloucester
- 专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址： US MA Gloucester
- 主分类号： H01J37/08
- IPC分类号： H01J37/08
摘要：
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation, the apparatus including an ion source having a hot cathode and a high frequency plasma generator, wherein the ion source has multiple modes of operation.
公开/授权文献
- US20090166554A1 TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE 公开/授权日：2009-07-02
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