Invention Grant
- Patent Title: Method for adjusting an electrical parameter on an integrated electronic component
- Patent Title (中): 用于调整集成电子部件上的电参数的方法
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Application No.: US10276509Application Date: 2001-03-13
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Publication No.: US07704757B2Publication Date: 2010-04-27
- Inventor: Francis Dell'Ova , Frank Lhermet , Dominique Poirot , Stephane Rayon , Bertrand Gomez , Nicole Lessoile , Pierre Rizzo
- Applicant: Francis Dell'Ova , Frank Lhermet , Dominique Poirot , Stephane Rayon , Bertrand Gomez , Nicole Lessoile , Pierre Rizzo
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics S.A.
- Current Assignee: STMicroelectronics S.A.
- Current Assignee Address: FR Montrouge
- Agency: Fleit Gibbons Gutman Bongini & Bianco P.L.
- Agent Lisa K. Jorgenson; Stephen Bongini
- Priority: FR0003260 20000314
- International Application: PCT/FR01/00750 WO 20010313
- International Announcement: WO01/69671 WO 20010920
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G06F19/00

Abstract:
A method is provided for manufacturing an integrated electronic component arranged on a substrate wafer. According to the method, at least one metallization step is performed, and a value of an electrical parameter of the integrated electronic component is determined after the at least one metallization step. A subsequent metallization step is performed after determining the value of the electrical parameter. The subsequent metallization step is performed using an adjustment mask chosen from n predefined masks based on a desired value of the electrical parameter, so as to obtain the desired value of the electrical parameter of the integrated electronic component after manufacturing. In one preferred embodiment, a series of electrical tests is performed on the wafer using test equipment, and the value of the electrical parameter is determined using the same test equipment as is used to perform the series of electrical tests.
Public/Granted literature
- US20040023482A1 Method for adjusting an electrical parameter on an integrated electronic component Public/Granted day:2004-02-05
Information query
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